Design of Layer-to-Layer Coupler between Si and SiON Waveguides using Low Index (~1.6) SiON

Publication Information

Title

Japanese:	低屈折率(~1.6)SiON を利用した Si 導波路-SiON 導波路層間結合器の設計
English:	Design of Layer-to-Layer Coupler between Si and SiON Waveguides using Low Index (~1.6) SiON

Author

Japanese:	陳浩宇, Eissa Moataz, 姚凱繽, 堀川剛, 西山伸彦.
English:	Haoyu Chen, Eissa Moataz, Kaibin Yao, Tsuyoshi Horikawa, Nobuhiko Nishiyama.

Language

English

Journal/Book name

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English:

Volume, Number, Page

Published date

Mar. 14, 2025

Publisher

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Conference name

Japanese:
English:	The 72nd JSAP Spring Meeting 2025

Conference site

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English: