Comparison of Microstructure and Crystal Structure of Polycrystalline Silicon Exhibiting Varied Textures Fabricated by Microwave and Very High Frequency Plasma Enhanced Chemical Vapor Deposition and their transport properties
著者
和文:
Toshio KAMIYA,
Kouichi NAKAHATA,
Kazuyoshi RO,
Charles Michael FORTMANN,
Isamu SHIMIZU.
英文:
Toshio KAMIYA,
Kouichi NAKAHATA,
Kazuyoshi RO,
Charles Michael FORTMANN,
Isamu SHIMIZU.
各種検索
サポート
ヘルプ