The effect of cyclic deformation on superelastic behavior was investigated in Ti-26Nb and Ti-23Nb-1.0N (at.%) alloys. Cyclic loading-unloading tensile tests with a constant maximum applied strain of 2.5% were carried out until the 500th cycle. With increasing number of cycles, the critical stress for inducing the martensitic transformation decreased and the residual strain increased. In the Ti-26Nb alloy, it was confirmed that the increase of the residual strain during the cyclic deformation was due primarily to the increase in the residual martensites. More stable cyclic deformation behavior was confirmed in the Ti-23Nb-1.0N alloy compared with the Ti-26Nb alloy owing to the higher critical stress for slip.