The ultra-thin palladium membrane was diffusion-bonded with the austenitic stainless steel SUS304 disks at various temperature and with the bonding time of 1,800s under the pressure of 0.2 MPa. The cross sections of the joined interface were examined using FE-SEM. The element distribution showed that the counter diffusion between the Pd membrane and SUS304 austenitic stainless steel was not occurred apparently at the bonding temperature of 1,000℃. But at 1,100℃, the counter diffusion made the Pd membrane totally change into the intermetallic compound. According to the results, the nominal diffusion coefficient of Pd/SUS304 was obtained.