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タイトル
和文: 
英文:Nanoscale Etching and Flattening of Metals with Ozone Water 
著者
和文: 羽月竜治, 山本貴富喜.  
英文: Ryuji Hatsuki, Takatoki Yamamoto.  
言語 English 
掲載誌/書名
和文: 
英文:Nano Letters 
巻, 号, ページ Vol. 12    No. 6    pp. 3158-3161
出版年月 2012年6月16日 
出版者
和文: 
英文:ASC Publications 
会議名称
和文: 
英文: 
開催地
和文: 
英文: 
DOI https://doi.org/10.1021/nl301112r
アブストラクト Etchants used for metal etching are generally harmful to the environment. We propose an environmentally friendly method that uses ozone water to etch metals. We measured the dependencies of ozone water etching on the temperature and ozone concentration for several metals and evaluated the surface roughness of the etched surfaces. The etching rate was proportional to the dissolved ozone concentration, and the temperature and the surfaces were smoothed by etching.

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