To understand the electron temperature Te (or electron energy distribution function; EEDF) and electron density Ne of non-equilibrium plasmas, three optical emission spectroscopy (OES) methods assisted with the collisional radiative (CR) model are described. The methods are (1) extraction method of dominant excitation kinetic processes, (2) line-pair methods with ratios of excited-state populations on Te-Ne contour map, and (3) conversion table between electron temperature and excitation temperature. Measurements of low-temperature argon plasmas are demonstrated.
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