"Sen Yao,Shunji Goto,Ryo Tanabe,Tadahiko Shinshi,Minoru Uehara,Hitoshi Yamamoto","Positioning Control of a Cantilever Type Micro Actuator Using High-performance NdFeB/Ta Thin Film Magnets and Built-in Displacement Sensor","the 2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment","Proceedings of the 2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment",,,,"pp. 407-408",2009,June
"田辺 亮,後藤駿治,ＳＥＮ ＹＡＯ,進士忠彦,上原稔,山本日登志","高性能薄膜ネオジム永久磁石を用いた２自由度駆動型マイクロアクチュエータ","第21回｢電磁力関連のダイナミクス｣シンポジウム","第21回｢電磁力関連のダイナミクス｣シンポジウム講演論文集",,,,"pp. 93-96",2009,May
"後藤俊治,田辺亮,Yao Sen,櫻井淳平,進士忠彦,上原 稔,山本 日登志","高性能薄膜ネオジム永久磁石を用いた片持ばり型マイクロアクチュエータの変位測定と位置決め制御","2009年度 精密工学会春季大会学術講演会","2009年度精密工学会春季大会学術講演会講演論文集",,,,"pp. 793-794",2009,Mar.
"Sen Yao,Shunji Goto,Junpei Sakurai,TADAHIKO SHINSHI,Minoru Uehara,Hitoshi Yamamoto","SiN-based Micro Cantilever Actuators Using NdFeB/Ta Permanent Magnetic Thin Film","Proceedings of IEEE-NEMS","The 4th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",,,,"pp. 411-414",2009,Jan.
"上原稔,後藤駿治,Sen Yao,進士忠彦,櫻井淳平,上原稔,山本日登志","薄膜ネオジム磁石を用いたマイクロアクチュエータの試作と位置決め制御","第17回MAGDAコンファレンスin日立","電磁現象および電磁力に関するコンファレンス講演論文集","日本AEM学会",,,"pp. 75-78",2008,Nov.
"Sen Yao,Shunji Goto,Junpei Sakurai,Tadahiko Shinshi,Minoru Uehara","Micro Cantilever Type Magnetic Actuators Using NdFeB Thin Film",,"2008年度精密工学会秋季大会学術講演会講演論文集",,,,"pp. 549-550",2008,Sept.