"Yuki Taoka,Tomohiro Ryo,Sanchuan XU,Shigeki SAITO","Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes",,"Engineering Research Express","IOP Publishing","Vol. 6","No. 1","pp. 015046",2024,Jan.
"Ryo Tomohiro,Yuki Taoka,Shigeki Saito","Development of bipolar electrostatic chucks with a compliant beam-array assembly from composite-laminated plates using abrasive water jet",,"MRS Advances",,,,,2022,Aug.
"—½’qŠ°,“c‰Ŗ—SŽ÷,āV“”Ž ‹K","—Ąę’[‚ɉń“]Ž©—R“x ‚š—L‚·‚é”÷×–Ń‘o‹É Œ^Ć“dƒ`ƒƒƒbƒN‚ĢŠJ ”­","2022”N“xø–§HŠw‰ļt‹G‘å‰ļŠwpu‰‰‰ļ","2022”N“xø–§HŠw‰ļt‹G‘å‰ļŠwpu‰‰‰ļ˜_•¶W",,,,,2022,Mar.
"—½ ’qŠ°,“c‰Ŗ —SŽ÷,ƒwƒ€ƒ^ƒr[ ƒpƒ\ƒ€ƒ|[ƒ“,‚‹“ –M•v,źŽ“” Ž ‹K","•”‡Ž‚ĢƒEƒH[ƒ^[ƒWƒFƒbƒg‰ĮH‚É‚ę‚é”÷×–ѐƓdƒ`ƒƒƒbƒN‚Ģ»‘¢Žč–@‚ÉŠJ”­","2020”N“xø–§HŠw‰ļt‹G‘å‰ļŠwpu‰‰‰ļ","2020”N“xø–§HŠw‰ļt‹G‘å‰ļŠwpu‰‰‰ļu‰‰˜_•¶W",,,,"p. 499-500",2020,Mar.