"渡邉春海,栗岡智行,陳君怡,Tso-Fu Mark Chang,TENNETIDEVI,町田克之,伊藤浩之,三宅美博,曽根正人","MEMS 加速度センサのための Ti/Au 多層カンチレバーの 実効ヤング率に対する測定電圧依存性に関する研究","Future Technologies fromSENDAI 2024 第 16 回集積化MEMSシンポジウム",,,,,,2024,Nov. "Shunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Tenneti Devi Srujana,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Investigation of Effects of Applied Voltage on Effective Young’s modulus of Ti/Au Multi-Layered Micro-Cantilevers” New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part","New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part",,,,2024,Oct. "Syunkai Watanabe,Shunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Tenneti Devi Srujana,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Applied Voltage on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept. "Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers ?",,"Micro and Nano Engineering",,"Vol. 29",,"p. 100249",2024,Mar. "Syunkai Watanabe,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers","MNE2023","49th international conference on Micro and Nano Engineering (MNE2023)",,,,,2023,Sept. "渡邉 春海,Chen Chun-Yi,栗岡 智行,Chang Tso-Fu Mark,大西 哲,Parthojit Chakraborty,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","Ti/Au 多層カンチレバーの実効ヤング率における構造因子の研究","第70回応用物理学会春季学術講演会","第70回応用物理学会春季学術講演会",,,,"p. 16a-B410-4",2023,Mar.