"Masato Ishibashi,Ryo Tanabe,Tadahiko Shinshi,Minoru Uehara","Electromagnetic-Force-Driving Type Mems Switch Using High Performance NdFeB/Ta Thin Film Permanent Magnet","The Twenty-fifth Annual Meeting of The American Society for Precision Engineering","Proceedings of The Twenty-fifth Annual Meeting of The American Society for Precision Engineering","American Society for Precision Engineering",,,,2010,Nov. "΋´³“o,“c•Ó—º,iŽm’‰•F,㌴ –«","‚«”\”––Œ‰i‹vŽ¥Î‚ð—p‚¢‚½“dŽ¥—Í‹ì“®Œ^RF-MEMSƒXƒCƒbƒ`","‘æ22‰ñu“dŽ¥—ÍŠÖ˜A‚̃_ƒCƒiƒ~ƒNƒXvƒVƒ“ƒ|ƒWƒEƒ€","‘æ22‰ñu“dŽ¥—ÍŠÖ˜A‚̃_ƒCƒiƒ~ƒNƒXvƒVƒ“ƒ|ƒWƒEƒ€ u‰‰˜_•¶W","“ú–{‹@ŠBŠw‰ï",,"No. 10-252","p. 704-705",2010,May "㌴–«,“c•Ó—º,ŸNˆä~•½,iŽm’‰•F","Nd2Fe14BŠî‰i‹vŽ¥Î”––Œ‚Ì“à•”‰ž—͒ጸ‰»‹Zp‚ÌŒŸ“¢","‘æ33‰ñ“ú–{Ž¥‹CŠw‰ïu‰‰‰ï","‘æ33‰ñ“ú–{Ž¥‹CŠw‰ïu‰‰‰ïŠT—vW",,,,"pp. 12pE-5",2009,Sept. "Sen Yao,Shunji Goto,Ryo Tanabe,Tadahiko Shinshi,Minoru Uehara,Hitoshi Yamamoto","Positioning Control of a Cantilever Type Micro Actuator Using High-performance NdFeB/Ta Thin Film Magnets and Built-in Displacement Sensor","the 2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment","Proceedings of the 2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment",,,,"pp. 407-408",2009,June "“c•Ó —º,Œã“¡xŽ¡,‚r‚d‚m ‚x‚`‚n,iŽm’‰•F,㌴–«,ŽR–{“ú“oŽu","‚«”\”––ŒƒlƒIƒWƒ€‰i‹vŽ¥Î‚ð—p‚¢‚½‚QŽ©—R“x‹ì“®Œ^ƒ}ƒCƒNƒƒAƒNƒ`ƒ…ƒG[ƒ^","‘æ21‰ñ¢“dŽ¥—ÍŠÖ˜A‚̃_ƒCƒiƒ~ƒNƒX£ƒVƒ“ƒ|ƒWƒEƒ€","‘æ21‰ñ¢“dŽ¥—ÍŠÖ˜A‚̃_ƒCƒiƒ~ƒNƒX£ƒVƒ“ƒ|ƒWƒEƒ€u‰‰˜_•¶W",,,,"pp. 93-96",2009,May "Œã“¡rŽ¡,“c•Ó—º,Yao Sen,ŸNˆä~•½,iŽm’‰•F,㌴ –«,ŽR–{ “ú“oŽu","‚«”\”––ŒƒlƒIƒWƒ€‰i‹vŽ¥Î‚ð—p‚¢‚½•ÐŽ‚΂èŒ^ƒ}ƒCƒNƒƒAƒNƒ`ƒ…ƒG[ƒ^‚̕ψʑª’è‚ƈʒuŒˆ‚ߧŒä","2009”N“x ¸–§HŠw‰ït‹G‘å‰ïŠwpu‰‰‰ï","2009”N“x¸–§HŠw‰ït‹G‘å‰ïŠwpu‰‰‰ïu‰‰˜_•¶W",,,,"pp. 793-794",2009,Mar.