"KAZUO TSUTSUI,Masaoki Tanaka,Norifumi Hoshino,Hiroshi Nohira,Kuniyuki KAKUSHIMA,Ahmet Parhat,���X�ؗY��N,Bunji Mizuno,T. Muro,T. Kinoshita,takeo hattori,HIROSHI IWAI","Soft X-ray Photoelectron Spectroscopy Study of Activation and Deactivation of Impurities in Shallow Junctions","ICSICT(International Conference on Solid-State and Integrated Circuit Technology)2010",,,,,,2010,Nov.