"Kenji Ozawa,Miyuki Kouda,Y. Urabe,T. Yasuda,Kuniyuki KAKUSHIMA,Ahmet Parhat,HIROSHI IWAI","La2O3  insulators prepared by ALD using La(iPrCp)3 source: self-limiting growth conditions and electrical properties","ICSICT(International Conference on Solid-State and Integrated Circuit Technology)2010",,,,,,2010,Nov.