"Yasuhisa Sato,Rinshi Sugino,Masaki Okuno,Toshiro Nakanishi,Takashi Ito","Electrical Characteristics of Silicon Devices after UV-Excited Cleaning",,"IEICE Transaction on Electronics","The Institute of Electronics, Information and Communication Engineers","Vol. E-76C","No. 1","pp. 41-45",1993,Jan.
"Rinshi Sugino,Yoshiko Okui,Masaki Okuno,Mayumi Shigeno,Yasuhisa Sato,Akira Osawa,Takashi Ito","Removal of Fe and Al on a Silicon Surface Using UV-Excited Dry Cleaning",,"IEICE TRANSACTIONS on Electronics","The Institute of Electronics, Information and Communication Engineers","Vol. E-75-C","No. 7","pp. 829-833",1992,July
"Takashi Ito,Rinshi Sugino,Yasuhiro Sato,Masaki Okuno,Akira Osawa,Takayuki Aoyama,Tatsuya Yamazaki,Yoshihiro Arimoto","Photo-Excited Cleaning of Silicon with Chlorine and Fluorine","MRS Symp. Proceeding","MRS Symp. Proceeding",,,,,1992,
"Yasuhisa Sato,Rinshi Sugino,Masaki Okuno,Nobuo Kikuchi,Junichi Teramae,Akinao Ogawa,Shinpei Hijiya,Takashi Ito","Photo-Excited Dry Cleaning for ULSI","Proc. of VLSI Symp. on Tech. System and Application","Proc. of VLSI Symp. on Tech. System and Application",,,,,1991,
"Rinshi Sugino,Masaki Okuno,Yoshiko Okui,Mayumi Shigeno,Yasuhisa Sato,Akira Osawa,Takashi Ito","UV Excited Dry Cleaning of Silicon Surfaces Contaminated with lron and Aluminum","Proc. of 2nd Int. Symp. on Cleaning Technology in Semicon. Device Manufacturing, ECS Fall Meeting","Proc. of 2nd Int. Symp. on Cleaning Technology in Semicon. Device Manufacturing, ECS Fall Meeting",,,,"pp. 512-513",1991,
"Yasuhisa Sato,Rinshi Sugino,Masaki Okuno,Takashi Ito","Reliability Improvement of the MOS Structures Using Photo-Excited Dry Cleaning Before Oxidation","Ext. Abst. of Int. Conf. on SSDM","Ext. Abst. of Int. Conf. on SSDM",,,,,1990,