"Fumitoshi Sugimoto,Yoshihiro Arimoto,Takashi Ito","Simultaneous Temperature Measurement of Wafers in Chemical Mechanical Polishing of Silicon Dioxide Layer",,"Japanese Journal of Applied Physics","The Japan Society of Applied Phisics","Vol. 34","No. 12A","pp. 6314-6320",1995,Dec. "Fumitoshi Sugimoto,Hiroshi Horie,Yoshihiro Arimoto,Takashi Ito","A pH-Controlled Chemical Mechanical Polishing Method for Thin Bonded Silicon-on-Insulator Wafers",,"Japanese Journal of Applied Physics","The Japan Society of Applied Phisics","Vol. 34","No. 1","pp. 30-35",1995,Jan. "Yoshihiro Arimoto,Hiroshi Horie,Naoshi Higaki,Manabu Kojima,Fumitoshi Sugimoto,Takashi Ito","Advanced Metal Oxide Semiconductor and Bipolar Devices on Bonded Silicon-on-Insulators",,"Journal of The Electrochemical Society","The Electrochemical Society","Vol. 140","No. 4","pp. 1138-1143",1993,Apr.