"Akihiro Matsutani,Hideo Ohtsuki,Ken Ohashi,Tomonori Yokoyama,Hirokazu Yamakage,FUMIO KOYAMA","Vertical and Smooth Microfabrication of InP Using Simple High-Density Plasma System with SmCo Ring Magnet",,"Jpn. J. Appl. Phys.",,"Vol. 43","No. 7B","pp. L960-L962",2004,July