"Ke Tao,Jun-ichi Hanna","Low-temperature epitaxial growth of Ge-rich SiGe film on Si by Reactive Thermal Chemical Vapor Deposition","2013MRS Fall Meeting",,,,," T9.18",2013,Dec. "Ke Tao,Jun-ichi Hanna","Epitaxial growth of germanium-rich silicon-germanium films on Si(0 0 1) substrate by reactive thermal chemical vapor deposition",,"Appl. Surf. Sci.",,"Vol. 282",,"pp. 472-477",2013,June "Ke Tao,Yoshinori Kurosawa,Jun-ichi Hanna","Low-temperature epitaxial growth of high quality Si1-xGex (x???0.99) films on Si(001) wafer by reactive thermal chemical vapor deposition",,"Appl. Phys. Lett.",,"Vol. 102","No. 18","pp. 182109 - 182109-5",2013,May