"Masato Sone,Tso-Fu Mark Chang,Tomoyuki Kurioka,Chun-yi Chen,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake","Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers","244th ECS Meeting","244th ECS Meeting",,,,,2023,Oct. "Tso-Fu Mark Chang,Volodymyr Chernenko,Hao-Chun Tang,Chun-yi. Chen,Akira Umise,Masaki Tahara,Hideki Hosoda,Masato Sone","Superelastic behavior of single crystalline Ni48Fe20Co5Ga27 micro-pillars near austenite - martensite critical point",,"AIP Advances","AIP Publishing","Vol. 11",,"p. 025213",2021,Feb. "Masato Sone,Hao-Chun Tang,Chun-yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June "Wan-Ting Chiu,Yuma Tahara,Chun-yi Chen,Tso-fu Mark Chang,Tomoko Hashimoto,Hiromichi Kurosu,Masato Sone","Composite of ZnO/Au Hybrid Structure on Silk Textile for Flexible Photocatalyst Application","TMS 2018 Annual Meeting & Exhibition",,,,,,2018,Mar. "Keisuke Asano,Hao-Chun Tang,Chun-yi Chen,Takashi Nagoshi,Tso-fu Mark Chang,Daisuke Yamane,Kazuya Masu,Masato Sone","Enahnced Bending Strength of Electrodeposited Pure Gold Canrilevers in Micro-Bending Test","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept. "Wan-Ting Chiu,Yuma Tahara,Chun-yi Chen,Tso-fu Mark Chang,Tomoko Hashimoto,Hiromichi Kurosu,Masato Sone","ZnO/Au Hybrid Layered Structure on Silk Textile Prepared by Supercritical Carbon Dioxide Promoted Electrodeposition for Applications in Flexible Multifunction Electronic Devices","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept. "Chun-Yi Chen,Hao-chun Tang,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components","21th International Conference on Solid State Ionics, SSI-21","SSI-21",,,,,2017,June "Hao-chun Tang,Chun-yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Evaluation of Electroplated Au-Cu Alloys toward Applications in MEMS Accelerometers","21th International Conference on Solid State Ionics, SSI-21","SSI-21",,,,,2017,June "曽根 正人,Tso-Fu Mark Chang,Chun-yi Chen,山根 大輔,小西 敏文,町田 克之,益 一哉","非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価","第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー","第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー",,,,,2017,June "曽根正人,Tso-Fu Mark Chang,Chun-yi Chen,山根大輔,益一哉,町田克之","微小電気機械システムのための超臨界流体を用いた金属皮膜形成技術 (招待講演)","第6回CSJ化学フェスタ","第6回CSJ化学フェスタ","日本化学会",,,,2016,Nov. "曽根 正人,Chang Tso-Fu Mark,陳 君怡,山根 大輔,益 一哉,町田 克之","高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価 (招待講演)","日本学術振興会・第172委員会","日本学術振興会・第172委員会",,,,,2016,Oct. "Mark Chang,Wei-Hao Lin,Chun-Yi Chen,Yung-Jung Hsu,Chi-Chang Hu,TATSUO SATO,Masato Sone","Conducting Electrochemical Reactions with Supercritical Carbon Dioxide Emulsified Electrolyte","66th Annual Meeting of the International Society of Electrochemistry",,,,,,2015,Oct. "Daisuke Yamane,Toshifumi Konishi,Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Hiroshi Toshiyoshi,Kazuya Masu,Masato Sone,Katsuyuki Machida","A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology","25th Advanced Metallization Conference Asian Session (ADMETAplus2015)",,,,,,2015,Sept. "Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Compression deformation of micro-components fabricated by FIB from gold electrodeposited films","International Symposium for Advanced Materials Research, ISAMR2015","ISAMR2015",,,,"pp. P13",2015,Aug. "Tso-Fu Mark Chang,Lin Wei-Hao,Hsu Yung-Jung,Chun-Yi Chen,Tatsuo Sato,Masato Sone","Effect of Pressure on Titanium Dioxide Electrodeposited Cathodically with Supercritical Carbon Dioxide","17th Topical Meeting of the International Society of Electrochemistry",,,,,,2015,May