"Takeshi Takeuchi,Takeshi Katayama,Masahiro Okamura,Katsuki Yano,Akira Sakumi,Toshiyuki Hattori,Noriyosu Hayashizaki,Robert A. Jameson","A direct plasma injection system into an RFQ for clean and safe ion implantation",,"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",,"Vol. 188",,"pp. 233-237",2002,Apr.