"Sanchuan XU,Yuki Taoka,Shigeki SAITO","Attractive Force Increased by Rotational Degree Of-Freedom Tip Structure Used in Beam Structure Electrostatic Chucks","2024年度精密工学会春季大会学術講演会",,,,,,2024,Mar.
"Yuki Taoka,Tomohiro Ryo,Sanchuan XU,Shigeki SAITO","Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes",,"Engineering Research Express","IOP Publishing","Vol. 6","No. 1","pp. 015046",2024,Jan.
"Yuki Taoka,Terumichi Hayashi,Sanchuan XU,Shigeki SAITO","Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure",,"Advanced Robotics","Taylor & Francis","Vol. 37","No. 23","pp. 1507-1519",2023,Nov.
"Sanchuan XU,Yuki Taoka,Shigeki SAITO","Rotational-Degree-Of -Freedom Tip Structure Used in Collective Beam Structure Electrostatic Chuck for Curved Surfaces","2022年度精密工学会春季大会学術講演会","2022年度精密工学会春季大会学術講演会論文集",,,,,2022,Mar.