"Daichi Sugauchi,KAZUHIRO YOSHIDA,Sang In EOM,Joon-wan KIM","A Study on a MEMS Electro-Rheological Valve for Higher Pressure","10th Int. Conf. on Fluid Power Transmission and Control (ICFP 2021)","10th Int. Conf. on Fluid Power Transmission and Control (ICFP 2021) Conf. Proc. (Web Proc.)",,,,"pp. 473-475",2021,Apr. "›“à ‘å’n,‹g“c ˜aO,šŽ Ëm,‹à rŠ®","‚ˆ³‚Å‹ì“®‚·‚éERƒ}ƒCƒNƒƒVƒXƒeƒ€‚ÉŠÖ‚·‚錤‹†","ŽR—œu‰‰‰ï2019","ŽR—œu‰‰‰ï 2019u‰‰˜_•¶W ‚b‚c",,,"No. 190-3","pp. 77-78",2019,Oct.