"Kazutoshi Okutsu,Takehiko Yamaguchi,Kaiji Sato","Fabrication Process Improvement of Optical MEMS Switch Using a Belt-shaped Thin Film Mirror","3rd International Conference of Asian Symposium for Precision Engineering and Nanotechnology","Proceedings of 3rd International Conference of Asian Symposium for Precision Engineering and Nanotechnology","The Japan Society for Precision Engineering",,,,2009,Nov.
"ŽRŒϋ Šx•F,‰œ’Γ ˜ar,²“‘ ŠC“ρ","‘я󔖖Œƒ~ƒ‰[‚π—˜—p‚΅‚½MEMSŒυƒXƒCƒbƒ`‚̐»μE‘g—§–@","2008”N“xΈ–§HŠw‰οt‹G‘ε‰οŠwpu‰‰‰ο","2008”N“xΈ–§HŠw‰οt‹G‘ε‰οŠwpu‰‰‰οu‰‰˜_•ΆW","Έ–§HŠw‰ο",,,"pp. 553-554",2008,Mar.