"Mariam Md Ghazaly,Kaiji Sato","Characteristic switching of a multilayer thin electrostatic actuator by a driving signal for an ultra-precision motion stage",,"Precision Engineering","Elsevier","Vol. 37","No. 1","pp. 107-116",2013,Feb.
"Kaiji Sato,Mariam Md Ghazaly","Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid","The 5th International Conference on Positioning Technology","Proceedings of the 5th International Conference on Positioning Technology",,,,"pp. 13-14",2012,Nov.
"Kaiji Sato,Mariam Md Ghazaly","Driving Mode Control of a Multilayered Thin Electrostatic Actuator Supported by Lubricating Oil for Ultra-Precision Positioning","27th Annual Meeting of the American Society for Precision Engineering","Proc. of ASPE2012",,,,"pp. 144-147",2012,Oct.
"佐藤海二,Mariam Md Ghazaly","潤滑液で支持された多層構造静電アクチュエータを用いた精密垂直微動ステージ","2012年度精密工学会秋季大会学術講演会","2012年度精密工学会秋季大会学術講演会講演論文集","精密工学会",,,"pp. 31-32",2012,Sept.
"佐藤海二,Mariam Md Ghazaly","多層構造静電アクチュエータの摩擦特性切換え機能と超精密位置決め","2012年度精密工学会春季大会学術講演会","2012年度精密工学会春季大会学術講演会講演論文集","精密工学会",,,"pp. 275-276",2012,Mar.
"Mariam Md Ghazaly,Kaiji Sato","Basic Characteristics of a Multilayer Thin Electrostatic Actuator Supported by Lubricating Oil for a Fine-motion Stage",,"Precision Engineering","Elsevier","Vol. 36","No. 1","pp. 77-83",2012,Jan.
"佐藤海二,Mariam Md Ghazaly","潤滑油で支持された多層構造静電アクチュエータの基礎特性と制御","2011年度精密工学会秋季大会学術講演会","2011年度精密工学会秋季大会学術講演会講演論文集","精密工学会",,,"pp. 661-662",2011,Sept.
"Mariam Md Ghazaly,Kaiji Sato","Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication","The 6th International Conference on MicroManufacturing (ICOMM 2011)","Proceedings of the 6th International Conference on Micromanufacturing (ICOMM2011)","Committees of ICOMM - 2011",,,"pp. 577-581",2011,Mar.
"Mariam Md Ghazaly,Kaiji Sato","Open-loop Characteristics of a Multilayer Electrostatic Actuator for a Fine Motion Stage","14th International Conference on Mechatronics Technology","Proceedings of the 4th International Conference on Mechatronics Technology","ICMT2010 Organizing Committee",,,,2010,Nov.
"Mariam Md Ghazaly,Kaiji Sato","Control Performances of a Fine Motion Stage using a Multilayer Electrostatic Actuator without Precise Balls for Lubrication","14th International Conference on Mechatronics Technology","Proceedings of the 4th International Conference on Mechatronics Technology","ICMT2010 Organizing Committee",,,,2010,Nov.