"Chao Zhi,Tadahiko Shinshi,Minoru Uehara,Akihiro Matsutani,Isamu Yuito,Teruaki Takeuchi","A Polydimethylsiloxane diaphragm integrated with a sputtered thin film NdFeB magnet",,"MICROSYST TECHNOL","Springer","Vol. 21",,"pp. 675-681",2015,Mar. "Chao Zhi","Fabrication and Application of Micro Diaphragm-type Electromagnetic Actuators Utilizing Thin Film Permanent Magnet",,,,,,,2014,Dec. "Chao Zhi","Fabrication and Application of Micro Diaphragm-type Electromagnetic Actuators Utilizing Thin Film Permanent Magnet",,,,,,,2014,Dec. "Chao Zhi","Fabrication and Application of Micro Diaphragm-type Electromagnetic Actuators Utilizing Thin Film Permanent Magnet",,,,,,,2014,Dec. "Ryogen Fujiwara,Chao Zhi,Tadahiko Shinshi,Elito Kazawa","Processing Technology of high Performance Thick Nd-Fe-B Film for Electromagnetic Energy Harvesters","The Third International Education Forum on Environment and Energy Science",,,,,,2014,Dec. "Chao Zhi,Tadahiko Shinshi,Mikiko Saito,Kunio Kato","Planar-type micro-electromagnetic actuators using patterned thin film permanent magunets and mesh type coils",,"Sensors and Actuators A: Physical","ELSEVIER",,,"pp. 365-372",2014,Oct. "Chao Zhi,Tadahiko Shinshi,Minoru Uehara","Design and Analysis of a Thin Film Permanent Mgnet Actuated Micro Pump",,"International Journal of Automation Technology","Fuji Technology Press LTD.","Vol. 7","No. 2","p. 196-204",2013,Mar. "Chao Zhi,Tadahiko Shinshi,Minoru Uehara,Akihiro Matsutani,Isamu Yuito,Teruaki Takeuchi","A Micro Polydimenthylsiloxane Diaphragm Integrated with Sputtered Thin Film NdFeB Magnet","The 17th International Conference On Mechatronic Technology","Proceedings of the 17th International Conference On Mechatronic Technology","International Conference On Mechatronics Technology",,,"p. 80-83",2013, "Chao Zhi,Tadahiko Shinshi,Minoru Uehara","A Valveless MEMS Pump Utilizing a Thin Film Permanent Magnet","14th International Conference on Prescision Engineering","Key Engineering Materials","Trans Tech Publications","Vol. 523-524",,"pp. 551-556",2012,Nov. "Chao Zhi,Tadahiko Shinshi,Minoru Uehara","Design of a Micro Pump Actuator Using a Thin Film Permanent Magnet","16TH International Conference on Mechatronics Technology","Proceeding of 16TH International Conference on Mechatronics Technology","Tianjin University",,,"p. 29-34",2012,Oct. "Chao ZHI,Tadahiko SHINSHI,Minoru UEHARA","A Micro Pump Driven by a Thin Film Permanent Magnet",,"Journal of Advanced Mechanical Design,Systems,and Manufacturing","JSME","Vol. 6","No. 7","p. 1180-1189",2012,Oct. "Chao Zhi,Tadahiko Shinshi,Minoru Uehara","A Thin Film Permanent Magnet Actuated Micro Pump","Fourth TIT-BIT Joint Workshop on Mechanical Engneering","Proceedings of:Fourth TIT-BIT Joint Workshop on Mechanical Engneering",,,,"p. 114-120",2012,Aug.