@article{CTT100862022,
  author = {Haruko Akutsu and Reiko Saito and Jun Asakawa and Kei Kiyokawa and Masato Morita and Tetsuo Sakamoto and Masaaki Fujii},
  title = {Distribution of trace impurities in micro volumes and analysis of concentration using laser sputtered neutral mass spectrometry},
  journal = {Journal of Vacuum Science & Technology B},
  year = 2021,
}

@article{CTT100822713,
  author = {Reiko Saito and Haruko Akutsu and Jun Asakawa and Yue Zhao and Kei Kiyokawa and Masato Morita and Tetsuo Sakamoto and Masaaki Fujii},
  title = {Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers},
  journal = {J. Vac. Sci. Technol., B},
  year = 2020,
}

@article{CTT100777434,
  author = {Reiko Saito and * Haruko Akutsu and Jun Asakawa and Shiro Takeno and Kei Kiyokawa and Satoru Nagashima and Takeharu Ishikawa and Takahiro Kashiwagi and Akio Takano and Tetsuo Sakamoto and Masaaki Fujii},
  title = {Matrix and element dependences of useful yield in Si and SiO2 matrices using laser-ionization sputtered neutral mass spectrometry},
  journal = {Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena},
  year = 2018,
}

@misc{CTT100861336,
  author = {圷晴子},
  title = {半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発},
  year = 2021,
}

@misc{CTT100861337,
  author = {圷晴子},
  title = {半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発},
  year = 2021,
}

@misc{CTT100910230,
  author = {圷晴子},
  title = {半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発},
  year = 2021,
}

@misc{CTT100910231,
  author = {圷晴子},
  title = {半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発},
  year = 2021,
}



@phdthesis{CTT100861336,
  author = {圷晴子},
  title = {半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発},
  school = {東京工業大学},
  year = 2021,
}

@phdthesis{CTT100861337,
  author = {圷晴子},
  title = {半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発},
  school = {東京工業大学},
  year = 2021,
}

@phdthesis{CTT100910230,
  author = {圷晴子},
  title = {半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発},
  school = {東京工業大学},
  year = 2021,
}

@phdthesis{CTT100910231,
  author = {圷晴子},
  title = {半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発},
  school = {東京工業大学},
  year = 2021,
}