@inproceedings{CTT100861932, author = {Tahsin Shameem and Shimpei Sato and Atsushi Takahashi and Hiroyoshi Tanabe and Yukihide Kohira and Chikaaki Kodama}, title = {A Fast LUT Based Point Intensity Computation for OPC Algorithm}, booktitle = {Proc. the 23rd Workshop on Synthesis And System Integration of Mixed Information technologies (SASIMI 2021)}, year = 2021, } @inproceedings{CTT100834856, author = {Tahsin Binte Shameem and Atsushi Takahashi and Hiroyoshi Tanabe and Yukihide Kohira and Chikaaki Kodama}, title = {A Fast Look Up Table Based Lithography Simulator with SOCS Model for OPC Algorithm}, booktitle = {Proc. DA Symposium 2020, IPSJ Symposium Series}, year = 2020, }