@article{CTT100910025,
  author = {Yuki Taoka and Tomohiro Ryo and Sanchuan XU and Shigeki SAITO},
  title = {Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes},
  journal = {Engineering Research Express},
  year = 2024,
}

@article{CTT100881710,
  author = {Ryo Tomohiro and Yuki Taoka and Shigeki Saito},
  title = {Development of bipolar electrostatic chucks with a compliant beam-array assembly from composite-laminated plates using abrasive water jet},
  journal = {MRS Advances},
  year = 2022,
}

@inproceedings{CTT100869423,
  author = {凌智寛 and 田岡祐樹 and 齋藤滋規},
  title = {梁先端に回転自由度 を有する微細毛双極 型静電チャックの開 発},
  booktitle = {2022年度精密工学会春季大会学術講演会論文集},
  year = 2022,
}

@inproceedings{CTT100847469,
  author = {凌 智寛 and 田岡 祐樹 and ヘムタビー パソムポーン and 高橋 邦夫 and 齊藤 滋規},
  title = {複合材のウォータージェット加工による微細毛静電チャックの製造手法に開発},
  booktitle = {2020年度精密工学会春季大会学術講演会講演論文集},
  year = 2020,
}

@misc{CTT100892301,
  author = {齋藤滋規 and 凌智寛 and 田岡祐樹 and XUSanchuan},
  title = {静電吸着デバイス及び静電吸着方法},
  howpublished = {公開特許},
  year = 2023,
  month  = {},
  note   = {PCT/JP2022/031126(2022/08/17), WO 2023/022180(2023/02/23)}
}