@inproceedings{CTT100702796, author = {Masato Sone and Tso-Fu Mark Chang and Tetsuya Shimizu and Nao Shinoda}, title = {Nanoscale Wiring by Cu Electrodeposition in Supercritical CO2 Emulsified Electrolyte with Continuous-Flow Reaction System (Invited Lecture)}, booktitle = {Separation Techniques 2016}, year = 2016, } @inproceedings{CTT100701914, author = {Masato Sone and Tso-Fu Mark Chang and Tetsuya Shimizu and Nao Shinoda}, title = {Nanoscale Wiring by Cu Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte toward 3D Integrated Circuits (Invited Lecture)}, booktitle = {CC3DMR}, year = 2016, } @inproceedings{CTT100658137, author = {Hikaru Kinashi and Tetsuya Shimizu and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Glow discharge optical emission spectroscopic study of Cu film fabricated by electrodepostion using supercritical CO2 emulsified electrolyte}, booktitle = {TACT2013}, year = 2013, }