@inproceedings{CTT100910029,
  author = {Shigeki Saito and Jeremy Gavriel and Juntian Zhou and Yuki Taoka},
  title = {Effect of Heat-Induced Adjustable Stiffness at the Contact Interface on the Gripping Force of a Bipolar Electrostatic Chuck},
  booktitle = {},
  year = 2023,
}