@inproceedings{CTT100584857, author = {Jeong-Woo Lee and Cheol hyun Lim and Jun-ichi Hanna}, title = {Deposition of device grade poly-Si films on glass substrate directly at 450 °C and fabrication of bottom-gate poly-Si TFTs}, booktitle = {Journal of Non-Crystalline Solids}, year = 2008, }