@article{CTT100588755, author = {Ahmet Parhat and 中川健太郎 and Kuniyuki KAKUSHIMA and Hiroshi Nohira and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Electrical characteristics of MOSFETs with La2O3/Y2O3 gate stack}, journal = {Microelectronics Reliability}, year = 2008, }