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研究業績一覧 (1件)
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国際会議発表 (査読なし・不明)
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Kuniyuki KAKUSHIMA,
Tomotsune Koyanagi,
来山大祐,
Miyuki Kouda,
Jaeyeol Song,
Takamasa Kawanago,
M. Mamatrishat,
Kiichi Tachi,
M. K. Bera,
Ahmet Parhat,
Hiroshi Nohira,
KAZUO TSUTSUI,
西山彰,
Nobuyuki Sugii,
KENJI NATORI,
takeo hattori,
Keisaku Yamada,
HIROSHI IWAI.
Direct Contact of High-k/Si Gate Stack for EOT below 0.7 nm using LaCe-silicate Layer with Vfb controllability,
2010 Symposium on VLSI Technology,
June 2010.
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