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研究業績一覧 (1件)
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国際会議発表 (査読有り)
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KAZUO TSUTSUI,
Masaoki Tanaka,
Norifumi Hoshino,
Hiroshi Nohira,
Kuniyuki KAKUSHIMA,
Ahmet Parhat,
佐々木雄一朗,
Bunji Mizuno,
T. Muro,
T. Kinoshita,
takeo hattori,
HIROSHI IWAI.
Soft X-ray Photoelectron Spectroscopy Study of Activation and Deactivation of Impurities in Shallow Junctions,
ICSICT(International Conference on Solid-State and Integrated Circuit Technology)2010,
Nov. 2010.
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