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研究業績一覧 (3件)
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論文
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Rinji Sugino,
Yoshiko Okui,
Mayumi Shigeno,
Satoshi Okuno,
Kanetake Takasaki,
Takashi Ito.
Dry Cleaning for Fe Contaminants on Si and SiO2 Surfaces with Silicon Chlorides,
J. Electrochem. Soc.,
Vol. 114,
No. 11,
pp. 3984-3988,
1997.
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Satoru Watanabe,
Mayumi Shigeno,
Noriaki Nakayama,
Takashi Ito.
Silicon Monohydride Termination of Silicon (111) Surface Formed by Boiling Water,
Japanese Journal of Applied Physics,
The Japan Society of Applied Phisics,
Vol. 30,
No. 12B,
pp. 3575-3579,
Dec. 1991.
国際会議発表 (査読有り)
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