@book{CTT100645577,
  author = {益一哉 and 町田克之 and 年吉洋 and 江刺 正喜 and 藤田博之 and 石田誠 and 田中 秀治 and 高橋 一浩 and 越田信義 and 小山 英樹 and 佐々木 実 and 秦誠一 and 橋口 原 and 高尾 英邦 and 永瀬 雅夫 and 山口 浩司 and 北澤 正志 and 前中 一介 and 澤田和明 and 柴崎 一郎 and 野村聡 and 竹内 幸裕 and 柴田 英毅 and 楢崎 祥一 and 鈴木 雄二 and 西岡 泰城 and 森村 浩季 and 日暮 栄治 and 千野 満 and 内山 直己 and 足立 秀喜 and 井上 晴伸 and 橋本 秀樹},
  title = {異種機能デバイス集積化技術の基礎と応用?MEMS, NEMS, センサ, CMOSLSIの融合?},
  publisher = {株式会社 シーエムシー出版},
  year = 2012,
}

@article{CTT100800956,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu},
  title = {A MEMS Accelerometer for Sub-mG Sensing},
  journal = {Sensors and Materials},
  year = 2019,
}

@article{CTT100721712,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer},
  journal = {Microelectronics Reliability},
  year = 2016,
}

@article{CTT100733964,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology},
  journal = {IEEE Proceeding},
  year = 2016,
}

@article{CTT100708352,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1-mG MEMS Sensor},
  journal = {ECS Transactions},
  year = 2016,
}

@article{CTT100692402,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 0.1G-to-20G Integrated MEMS Inertial Sensor},
  journal = {Japanese Journal of Applied Physics},
  year = 2015,
}

@article{CTT100690964,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Sensor},
  journal = {ECS Transactions},
  year = 2015,
}

@article{CTT100686951,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass},
  journal = {Microsystem Technologies},
  year = 2015,
}

@article{CTT100674611,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Integrated CMOS-MEMS Technology and Its Applications},
  journal = {ECS Transactions},
  year = 2014,
}

@article{CTT100669022,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100721714,
  author = {Daisuke Yamane and Yi-Chien Wu and Ting-Hsiang Wu and Hiroshi Toshiyoshi and Michael Teitell and Pei-Yu Chiou},
  title = {Electrical impedance monitoring of photothermal porated mammalian cells},
  journal = {Journal of Laboratory Automation},
  year = 2014,
}

@article{CTT100666863,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Katsuyuki Machida and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Design of sub-1g microelectromechanical systems accelerometers},
  journal = {Applied Physics Letters},
  year = 2014,
}

@article{CTT100684017,
  author = {山根 大輔 and サン ウィンストン and 川崎 繁男 and 藤田 博之 and 年吉 洋},
  title = {水平駆動型MEMS導波路の静電駆動時における高周波特性の評価手法},
  journal = {電子情報通信学会論文誌C(エレクトロニクスソサエティ)},
  year = 2014,
}

@article{CTT100666864,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100658034,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer},
  journal = {Japanese Journal of Applied Physics},
  year = 2013,
}

@article{CTT100657729,
  author = {Toshifumi Konishi and Katsuyuki Machida and Satoshi Maruyama and Makoto Mita and Kazuya Masu and Hiroshi Toshiyoshi},
  title = {A Single-platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator with Hardware Description Language},
  journal = {IEEE/ASME Journal of Microelectromechanical Systems},
  year = 2013,
}

@article{CTT100684018,
  author = {山根 大輔 and サン ウィンストン and 川崎 繁男 and 藤田 博之 and 年吉 洋},
  title = {エア分離CPWによるシリコン導波路の基礎検討とKu帯RF-MEMSスイッチへの応用},
  journal = {電子情報通信学会論文誌C（エレクトロニクスソサエティ)},
  year = 2012,
}

@article{CTT100674612,
  author = {Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi},
  title = {Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators},
  journal = {ECS Transactions},
  year = 2012,
}

@article{CTT100645028,
  author = {山根大輔 and サン  ウィンストン and 川崎 繁男 and 藤田 博之 and 年吉 洋},
  title = {エア分離CPWによるシリコン導波路の基礎検討とKu帯RF-MEMSスイッチへの応用},
  journal = {電子情報通信学会論文誌C（エレクトロニクスソサエティ）},
  year = 2012,
}

@article{CTT100684019,
  author = {Daisuke Yamane and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining},
  journal = {IEEE Journal of Microelectromechanical Systems},
  year = 2011,
}

@article{CTT100684020,
  author = {山根 大輔 and 李 宥憲 and 藤田 博之 and 年吉 洋},
  title = {メッキ金の厚膜マスクによるRF-MEMSコプレーナ導波路の製作},
  journal = {電気学会論文誌E（センサ・マイクロマシン部門誌）},
  year = 2011,
}

@article{CTT100684021,
  author = {Daisuke Yamane and Winston Sun and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design},
  journal = {IEICE Electronics Express},
  year = 2010,
}

@article{CTT100684022,
  author = {Daisuke Yamane and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism},
  journal = {IEICE Electronics Express},
  year = 2010,
}

@inproceedings{CTT100861797,
  author = {Chiu Wan-Ting and 曽根正人 and 年吉洋 and 細田秀樹},
  title = {金属基生体材料の表面改質および組織制御を基軸とした新材料設計},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100843876,
  author = {Wan-Ting Chiu and Tso-Fu Mark Chang and Masato Sone and Agnès Tixier-Mita and Hiroshi Toshiyoshi and Hosoda Hideki},
  title = {Strategies for the balance of oxide/metal composites towards the applications of flexible solar energy harvesters},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100839333,
  author = {Wan-Ting Chiu and Tso-Fu Mark Chang and Masato Sone and Agnès Tixier–Mita and Hiroshi Toshiyoshi},
  title = {Developments of Flexible and Biocompatible Hybrid Materials towards the Glucose Sensing Applications},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100807193,
  author = {Yukiya Tohyama and Hiroaki Honma and Noboru Ishihara and Hidehiko Sekiya and Hiroshi Toshiyoshi and Daisuke Yamane},
  title = {Energy Harvesting from Non-Stational Environmental Vibrations using a Voltage-Boost Rectifier Circuit},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100826572,
  author = {Wan-Ting Chiu and Tso-Fu Mark Chang and Masato Sone and Agnès Tixier-Mita and Hiroshi Toshiyoshi},
  title = {Non-Enzymatic Sensing of Glucose Based on Au Nanoparticles and TiO2 Modified Polyaniline},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100826574,
  author = {Wan-Ting Chiu and Yi-Husan Chiu and Ping-Yen Hsieh and Tso-Fu Mark Chang and Masato Sone and Yung-Jung Hsu and Agnès Tixier-Mita and Hiroshi Toshiyoshi},
  title = {Enhancement of electrocatalytic activity for 1-propanol oxidation in alkaline media via Au nanoparticles-TiO2/Polyaniline composite film},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100826573,
  author = {Wan-Ting Chiu and Tso-Fu Mark Chang and Masato Sone and Agnès Tixier-Mita and Hiroshi Toshiyoshi},
  title = {Non-enzymatic sensing of glucose based on Au nanoparticles-TiO2/polyaniline thin film composite},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100800105,
  author = {Yukiya Tohyama and Hiroaki Honma and Noboru Ishihara and Hiroshi Toshiyoshi and Daisuke Yamane},
  title = {Bandwidth Enhancement of Vibrational Energy Harvesters by a Voltage-Boost Rectifier Circuit},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100782445,
  author = {Daisuke Yamane and Hiroaki Honma and Hiroshi Toshiyoshi},
  title = {A MEMS VIBRATORY ENERGY HARVESTER CHARGED BY AN OFF-CHIP ELECTRET},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100781337,
  author = {Yukiya TOHYAMA and Hiroaki HONMA and Noboru Ishihara and Hidehiko SEKIYA and Hiroshi Toshiyoshi and Daisuke Yamane},
  title = {A Voltage-Boost Rectifier Circuit for Energy Harvesting from Environmental Vibrations},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100771791,
  author = {中島 英亮 and Tso-Fu Mark Chang and Chun-Yi Chen and 山根 大輔 and 小西 敏文 and 町田 克之 and 年吉 洋 and 益 一哉 and 曽根 正人},
  title = {MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討},
  booktitle = {第79回応用物理学会秋季学術講演会},
  year = 2018,
}

@inproceedings{CTT100768308,
  author = {HIdeaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and HIroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100758968,
  author = {中島英亮 and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 年吉洋 and 益 ⼀哉 and 曽根 正⼈},
  title = {電解めっき法によるTi/Au微⼩カンチレバーのヤング率評価},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100760805,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {高感度MEMS加速度センサのBrownian Noise評価に関する検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100755527,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1mG Inertial Sensors by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755521,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755519,
  author = {新島 宏文 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100750572,
  author = {M.S. Khan and K. Isamoto and C. Keum and N. Lafitte and K. Totsuka and C. Chong and N. Nishiyama and H. Toshiyosh},
  title = {A MEMS tunable VCSEL for Scalable SS-OCT},
  booktitle = {24th International Commission for Optics (ICO-24)},
  year = 2017,
}

@inproceedings{CTT100738774,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu},
  title = {MEMS inertial sensors for biomedical applications},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735888,
  author = {橘 航一朗 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735898,
  author = {佐布 晃昭 and 小西 敏文 and 山根 大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術による3軸MEMS加速度センサのばね定数設計方法},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735897,
  author = {小西敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735890,
  author = {中島 英亮 and Chang Tso-Fu Mark and 陳 君怡 and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735889,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 中島 英亮 and 寺西 美波 and 陳 君怡 and Chang Tso-Fu Mark and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735887,
  author = {鈴木 拓真 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100734201,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hideaki Nakajima and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733962,
  author = {小西 敏文 and 山根大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733961,
  author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733960,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733959,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {差動型積層メタルMEMS加速度センサの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100723356,
  author = {寺西美波 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 益一哉 and 曽根正人 and 小西敏文 and 町田克之 and 年吉洋},
  title = {電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価},
  booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム},
  year = 2016,
}

@inproceedings{CTT100716614,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100721709,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100721707,
  author = {Toshifumi Konishi and Daisuke Yamane and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716615,
  author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716613,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル差動型MEMS加速度センサの基礎検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716612,
  author = {小西 敏文 and 山根大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {CMOS-MEMS慣性センサにおける機械的ノイズの解析手法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100710653,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100708351,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1-mG MEMS Sensor},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702919,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702918,
  author = {小西敏文 and 山根大輔 and 佐布晃昭 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702917,
  author = {山根大輔 and 小西敏文 and 伊藤浩之 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702467,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100695299,
  author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695308,
  author = {佐布 晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695305,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {移動体制御における慣性センサ適用性の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695304,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G?20G集積化MEMS慣性センサ},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695306,
  author = {小西敏文 and 山根大輔 and 高安基大 and 伊藤浩之 and 道正志郎 and 石原昇 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692512,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices},
  booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials},
  year = 2015,
}

@inproceedings{CTT100695406,
  author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology},
  booktitle = {SSDM2015, 2015 International Conference on Solod State Devices and Materials},
  year = 2015,
}

@inproceedings{CTT100695311,
  author = {佐布晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695310,
  author = {小西敏文 and 山根大輔 and 高安基大 and 伊藤浩之 and 道正志郎 and 石原昇 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {ゲイン制御型CMOS-MEMS加速度センサ回路の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695309,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G?20G集積化MEMS加速度センサの基本評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695302,
  author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida},
  title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695301,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695300,
  author = {Toshifumi Konishi and Daisuke Yamane and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692272,
  author = {寺西美波 and Chang Tso-Fu Mark and 山根大輔 and 小西敏文 and 松島隆明 and 伊藤浩之 and 年吉 洋 and 町田克之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製した微小カンチレバーの形状安定性評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692273,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 亀井 将太 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {慣性センサを用いた移動体制御の基礎検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695298,
  author = {寺西美波 and Tso-Fu Mark Chang and 小西敏文 and 松島隆明 and 町田克之 and 年吉 洋 and 山根大輔 and 伊藤浩之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製したMEMSデバイスにおける動作構造安定性},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695297,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {MEMS慣性センサを用いた移動体制御の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100690965,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Sensor},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100686947,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683810,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {エネルギーハーべスティングデバイスの検討（5）},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100684706,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1G検出可能な3軸MEMS加速度センサの基礎検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683809,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695320,
  author = {Daisuke Yamane and Harunobu Seita and Winston Sun and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A 12-GHz DPDT RF MEMS Switch with Layer-wise Waveguide/Actuator Design Technique},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695319,
  author = {Kazuhiro Takahashi and Makoto Mita and Muneki Nakada and Daisuke Yamane and Akio Higo and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {Development of Multi-user Multi-chip SOI CMOS-MEMS Process},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100678032,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1mG-to-20G Integrated MEMS Inertial Sensor},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100678033,
  author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677570,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {集積化ＣＭＯＳ?ＭＥＭＳ技術によるＳｕｂ-１Ｇ加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677572,
  author = {松島隆明 and 山根大輔 and 小西敏文 and 年吉洋 and 益 一哉 and 町田克之},
  title = {Ａｕ積層形成技術による３軸ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677573,
  author = {小西敏文 and 松島隆明 and 山根大輔 and 益 一哉 and 年吉洋 and 町田克之},
  title = {回路シミュレータを用いたＭＥＭＳエネルギーハーベスティングデバイスの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676376,
  author = {亀井将太 and 山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676375,
  author = {Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676374,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676378,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {エネルギーハーべスティングデバイスの検討（４）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676377,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {積層メタル構造による３軸加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674569,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {マルチフィジックスシミュレータを用いたCMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674567,
  author = {山根大輔 and 亀井将太 and 小西敏文 and 松島隆明 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674568,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 亀井将太 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {積層メタルによる静電容量型3軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674565,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673061,
  author = {山根大輔 and 松島隆明 and 小西敏文 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673062,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673063,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Integrated CMOS-MEMS Technology and its Application},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100669023,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668511,
  author = {小西敏文 and 加賀谷 賢 and 山根大輔 and 松島隆明 and 伊藤浩之 and 石原 昇 and 益 一哉 and 町田克之 and 年吉 洋},
  title = {エネルギーハーベスティングデバイスの検討（３）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668510,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサ-２軸ＭＥＭＳ加速度センサの検討-},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668509,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1G MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668513,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {MEMS加速度センサによるSub-1G検出の基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668512,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベスティングデバイスの検討（２）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100663429,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 丸山智史 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {マルチフィジクスシミュレーションを用いた集積化CMOS-MEMS技術のためのセンサ回路の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663420,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1G MEMS Accelerometer},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663432,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの特性評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663428,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベストデバイスの小型化の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100661182,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 町田克之 and 益 一哉 and 年吉 洋},
  title = {CMOSとMEMS集積のためのシミュレーション解析-集積化CMOS-MEMSデバイス実現に向けて-},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660520,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベストデバイスの検討(1)},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660290,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの基本特性評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660291,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 丸山智史 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS-MEMS加速度センサ回路の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660521,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Satoshi Maruyama and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100659144,
  author = {佃 真文 and 山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの基礎検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658940,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {金メッキ集積化CMOS-MEMSによるアレイ型加速度センサの小型化},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658941,
  author = {小西敏文 and 丸山智史 and 山根大輔 and 松島隆明 and 町田克之 and 益 一哉 and 年吉 洋},
  title = {回路シミュレータを用いた集積化CMOS-MEMSのための統合設計環境の構築},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658938,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654652,
  author = {町田克之 and 小西敏文 and 山根大輔 and 年吉洋 and 益一哉},
  title = {集積化CMOS-MEMS技術の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654655,
  author = {小西敏文 and 山根大輔 and 本橋 剛 and 加賀谷 賢 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの設計},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654654,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 本橋 剛 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654653,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 本橋 剛 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＣＭＯＳ-ＭＥＭＳ加速度センサのためのデバイスの評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658939,
  author = {Hiroshi Toshiyoshi and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {A Mixed-Design Technique for Integrated MEMS using a Circuit Simulator with HDL},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100646781,
  author = {Hiroshi Toshiyoshi and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {A Multi-Physics Simulation Technique for Integrated MEMS},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100661262,
  author = {Kazuya Masu and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {How can we bridge the gap between photonics and Si CMOS LSI?},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645034,
  author = {小西敏文 and 丸山智史 and 三田信 and 山根大輔 and 伊藤浩之 and 町田克之 and 石原 昇 and 益一哉 and 藤田博之 and 年吉 洋},
  title = {ハードウェア記述言語を用いた集積化CMOS-MEMS統合設計技術},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645434,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645037,
  author = {Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi},
  title = {Multi-physics Equivalent Circuit Models for MEMS Sensors and Actuators},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645036,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサのためのデバイスの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645032,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {統合設計技術のためのMEMS加速度センサのモデルの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645029,
  author = {本橋 剛 and 小西敏文 and 松島隆明 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644390,
  author = {本橋 剛 and 小西 敏文 and 松島 隆明 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（4）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644391,
  author = {Toshifumi Konishi and Satoshi Maruyama and Makoto Mita and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644392,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644389,
  author = {松島 隆明 and 小西 敏文 and 本橋 剛 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（3）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644753,
  author = {Daisuke Yamane and Yi-Chien Wu and Ting-Hsiang  Wu and Hiroshi Toshiyoshi and Michael A.  Teitell and Pei-Yu  Chiou},
  title = {Real-Time Monitoring of Photothermal Porated Mammalian Cells by Electric Impedance Sensors},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100640424,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100653249,
  author = {山根大輔 and 本橋剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100709644,
  author = {Hiroyuki Fujita and Hiroshi Toshiyoshi and Tadashi Ishida},
  title = {From MEMS-CMOS towards Heterogeneous Integration over Scale},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100635241,
  author = {本橋剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS 加速度センサの検討(1)},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100635244,
  author = {小西敏文 and 本橋剛 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS 加速度センサの検討 (2)},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100695324,
  author = {山根大輔 and Winston Sun and 川崎繁男 and 藤田博之 and 年吉 洋},
  title = {SOIレイヤ分離設計によるモノリシックRF-MEMS移相器},
  booktitle = {},
  year = 2011,
}

@inproceedings{CTT100629997,
  author = {小西 敏文 and 丸山 智史 and 松島 隆明 and 三田 信 and 町田 克之 and 伊藤 浩之 and 石原 昇 and 益一哉 and 藤田 博之 and 年吉 洋},
  title = {集積化 CMOSCMOS--MEMSMEMS のための統合設計技術統合設計技術の検討 (2)},
  booktitle = {第 72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学) 30a-E-14},
  year = 2011,
}

@inproceedings{CTT100695312,
  author = {Daisuke Yamane and Hiroshi Toshiyoshi},
  title = {Monolithic integration of passive RF components by MEMS},
  booktitle = {},
  year = 2011,
}

@inproceedings{CTT100695325,
  author = {山根大輔 and 藤田博之 and 年吉洋},
  title = {機能レイヤ分離設計によるSOI RF-MEMS受動素子に関する研究},
  booktitle = {},
  year = 2011,
}

@inproceedings{CTT100695326,
  author = {山根大輔 and Winston Sun and 川崎繁男 and 藤田博之 and 年吉 洋},
  title = {Ku帯デュアルSPDT RF-MEMSスイッチの開発},
  booktitle = {},
  year = 2010,
}

@inproceedings{CTT100695316,
  author = {Daisuke Yamane and Winston Sun and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A Ku-Band RF-MEMS Phase Shifter with SOI Double-Side Bulk-Micromachining Design},
  booktitle = {},
  year = 2010,
}

@inproceedings{CTT100695314,
  author = {Daisuke Yamane and Hiroyuki Fujita and Hiroshi Toshiyoshi and Shigeo Kawasaki},
  title = {Development of a Dual-SPDT RF-MEMS Switch for Ku-band},
  booktitle = {},
  year = 2010,
}

@inproceedings{CTT100695317,
  author = {Daisuke Yamane and Kiyotaka Yamashita and Harunobu Seita and Hiroyuki Fujita and Hiroshi Toshiyoshi and Shigeo Kawasaki},
  title = {A Dual-SPDT RF-MEMS Switch on a Small-Sized LTCC Phase Shifter for Ku-band operation},
  booktitle = {},
  year = 2009,
}

@inproceedings{CTT100695327,
  author = {Winston Sun and Daisuke Yamane and Yuheon Yi and Hiroshi. Toshiyoshi and Hiroyuki Fujita and Kiyotaka Yamashita},
  title = {A Loaded-Line Phase Shifter Using MEMS Switches},
  booktitle = {},
  year = 2009,
}

@inproceedings{CTT100695318,
  author = {Daisuke Yamane and Kiyotaka Yamashita and Harunobu Seita and Hiroshi Toshiyoshi and Shigeo Kawasaki},
  title = {A Prototype of Ku-Band Small-Sized LTCC Phase Shifter with RF-MEMS Switches},
  booktitle = {},
  year = 2009,
}

@inproceedings{CTT100695328,
  author = {張鋭 and 山根大輔 and 藤田博之 and 年吉 洋},
  title = {RF-MEMS技術による可変メタマテリアル導波路の設計と試作},
  booktitle = {},
  year = 2009,
}

@inproceedings{CTT100695329,
  author = {山根大輔 and Winston Sun and 清田 晴信 and 川崎 繁男 and 年吉 洋},
  title = {Ku帯移相器用DPDT型RF-MEMSスイッチの設計と評価},
  booktitle = {},
  year = 2009,
}

@inproceedings{CTT100695321,
  author = {Daisuke Yamane and Takeshi Yamamoto and Kenichiro Urayama and Kiyotaka Yamashita and Hiroshi Toshiyoshi and Shigeo Kawasaki},
  title = {A Phase Shifter by LTCC Substrate with an RF-MEMS Switch},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100695322,
  author = {David Dubuc and Daisuke Yamane and Zhang Rui and Yuheon Yi and Katia Grenier and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {Modelling and Design Guidelines of Metamaterial-based Artificial Dielectric for the Miniaturization of Microwave Passive Circuit},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100695331,
  author = {山根大輔 and Winston Sun and 清田 晴信 and 川崎 繁男 and 藤田 博之 and 年吉 洋},
  title = {導波路/アクチュエータのレイヤ分離構造設計技術によるRF-MEMSスイッチ},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100695333,
  author = {Daisuke Yamane and Kazuhiro Takahashi and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {Microwave Switches by MEMS Technology and their Application to Phase-Shifter},
  booktitle = {},
  year = 2007,
}

@inproceedings{CTT100695332,
  author = {山本 剛司 and 清田 春信 and 川崎 繁男 and 山下 清隆 and 石崎 俊雄 and 田村 昌也 and 山根大輔 and 年吉 洋 and 篠原 真毅 and 三谷 友彦},
  title = {LTCC基板を用いたアクティブ集積フェーズドアレイアンテナ用移相器の試作},
  booktitle = {},
  year = 2007,
}

@inproceedings{CTT100695334,
  author = {Daisuke Yamane and Kazuhiro Takahashi and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {RF-MEMS Switches for 5.8 GHz Phase Shifter Application},
  booktitle = {},
  year = 2007,
}

@inproceedings{CTT100695335,
  author = {山根大輔 and 高橋 一浩 and Winston Sun and 清田 晴信 and 川崎 繁男 and 藤田 博之 and 年吉 洋},
  title = {アクティブフェイズドアレイアンテナの移相器応用RF-MEMSスイッチ},
  booktitle = {},
  year = 2007,
}

@inproceedings{CTT100695336,
  author = {山根大輔 and Winston Sun and 年吉 洋},
  title = {RF-MEMSスイッチに関する研究動向報告},
  booktitle = {},
  year = 2007,
}