@article{CTT100634524, author = {Shinpei Hijiya and Takashi Ito and Tetsuo Nakamura}, title = {A High-Speed Write/Erase EAROM Cell}, journal = {FUJITSU SCIENTIFIC & TECHNICAL JOURNAL}, year = 1984, } @article{CTT100634522, author = {Ichiro Kato and Takashi Ito and Tetsuo Nakamura and Hajime Ishikawa}, title = {Characteristics of Thermally Nitrided Silicon Dioxide Film and Plasma Enhancement}, journal = {Journal of Electronic Materials}, year = 1984, } @article{CTT100634525, author = {土屋真平 and 伊藤隆司 and 中村哲夫}, title = {傾斜したバンドギャップを持つ高速EAROMセル}, journal = {電子通信学会論文誌}, year = 1984, } @article{CTT100634519, author = {Takashi Ito and Tetsuo Nakamura and Hajime Ishikawa}, title = {Advantages of Thermal Nitride and Nirtoxide Gate Films in VLSI Process}, journal = {IEEE Transactions on Electron Devices}, year = 1982, } @article{CTT100634518, author = {Takashi Ito and Tetsuo Nakamura and Hajime Ishikawa}, title = {Effect of Thermally Nitrided SiO2 (Nirtoxide) on MOS Charactristics}, journal = {Journal of The Electrochemical Society}, year = 1982, } @article{CTT100634515, author = {Ichiro Kato and Takashi Ito and Shnichi Inoue and Tetsuo Nakamura and Hajime Ishikawa}, title = {Ammonia Annealed SiO2 Films for Thin Gate Insulators}, journal = {Japanese Journal of Applied Physics. Supplement}, year = 1982, } @article{CTT100634517, author = {Shinpei Hijiya and Takashi Ito and Tetsuo Nakamura and Hajime Ishikawa and Hideki Arakawa}, title = {A Nitride Barrier Avalanche Injection EAROM}, journal = {IEEE Journal of Solid-State Circuits}, year = 1982, } @article{CTT100634514, author = {Takashi Ito and Ichiro Kato and Takao Nozak and Tetsuo Nakamura and Hajime Ishikawa}, title = {Plasma enhanced Thermal Nitridation of Silicon}, journal = {Applied Phisics Letters}, year = 1981, } @inproceedings{CTT100634608, author = {Ichiro Kato and Takashi Ito and Tetsuo Nakamura and Hajime Ishikawa}, title = {Plasma Nitrided Silicon Dioxide Film for VLSI Gate Dielectrics}, booktitle = {Elec. Mat. Conf.}, year = 1983, } @inproceedings{CTT100634609, author = {Takashi Kato and Takashi Ito and Masao Taguchi and Tetsuo Nakamura and Hajime Ishikawa}, title = {Interfacial Oxidation of Ta205-Si Systems for High Density DRAM}, booktitle = {Dig. of Tech. Papers on 1983 Symp. on VLSI Tech.}, year = 1983, } @inproceedings{CTT100634606, author = {Takashi Ito and Ichiro Kato and Tetsuo Nakamura and Hajime Ishikawa}, title = {Thermal Nitride Thin Films for VLSI Circuits}, booktitle = {Proc. of Symp. on Silicon Nitride Thin Insulating Films, ECS}, year = 1983, } @inproceedings{CTT100634605, author = {Takashi Ito and Toshihiko Sugii and Tetsuo Nakamura}, title = {Aluminum Plasma CVD for VLSI Circuit Inter-connections}, booktitle = {Dig. of Tech. Papers on 1982 Symp. on VLSI Tech.}, year = 1982, } @inproceedings{CTT100634604, author = {Shinpei Hijiya and Takashi Ito and Tetsuo Nakamura and Hajime Ishikawa and Hideki Arakawa}, title = {A Nitride Barrier Avalanche Injection EAROM}, booktitle = {ISSCC Dig. of Tech. Papers}, year = 1982, } @inproceedings{CTT100634601, author = {Ichiro Kato and Takashi Ito and Shinichi Inoue and Tetsuo Nakamura and Hajime Ishikawa}, title = {Ammonia Annealed SiO2. Films for Thin Gate Insulators}, booktitle = {Ext. Abs. on 13th Conf. on SSDM}, year = 1981, } @inproceedings{CTT100634602, author = {Masao Taguchi and Takashi Ito and Tetsu Fukano and Tetsuo Nakamura and Hajime Ishikawa}, title = {Thermal Nitride Capacitors for High Density RAMs}, booktitle = {Tech. Dig. of IEDM}, year = 1981, } @inproceedings{CTT100634603, author = {Takashi Ito and Tetsuo Nakamura and Hajime Ishikawa}, title = {Thin Gate Insulators for VLSI}, booktitle = {Dig. of Tech. Papers on 1981 Symp. on VLSI Tech.}, year = 1981, } @inproceedings{CTT100634600, author = {Shinpei Hijiya and Takashi Ito and Tetsuo Nakamura and Nobuo Toyokura and Hajime Ishikawa}, title = {Electrically Alterable Read Only Memory Cell with Graded Energy Band-Gap Insulator}, booktitle = {Tech. Dig. of IEDM}, year = 1980, }