@article{CTT100634578,
  author = {Kenichi Goto and Tatsuya Yamazaki and Yasuo Nara and Tetsu Fukano and Toshihiro Sugii and Yoshihiro Arimoto and Takashi Ito},
  title = {Ti Salicide Process for Sub-quarter-Micron CMOS Devices},
  journal = {IEICE TRANSACTIONS on Electronics},
  year = 1994,
}

@article{CTT100634577,
  author = {Rinshi Sugino and Yasuo Nara and Hiroshi Horie and Takashi Ito},
  title = {Ultraviolet Excited Cl-Radical Etching of Si Through Native Oxides},
  journal = {Journal of Applied Physics},
  year = 1994,
}

@article{CTT100634575,
  author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito},
  title = {Fine Pattern Etching of Silicon Using SR-Assisted lonization of CP4 Gas},
  journal = {Journal of Photopolymer Science and Technology},
  year = 1993,
}

@article{CTT100634565,
  author = {Yasuo Nara and Fabrice Moscheni and Yoshio Sugita and Kei Horiuchi and Takashi Ito},
  title = {Evaluation of Photoemitted Current from SiO2 Film on Silicon During Synchrotron Radiation lrradiation},
  journal = {Japanese Journal of Applied Physics},
  year = 1992,
}

@article{CTT100634559,
  author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito},
  title = {Synchrotron Radiation-Assisted Silicon Homoepitaxy at 100 ℃ Using Si2H6/H2 Mixture},
  journal = {Applied Phisics Letters},
  year = 1992,
}

@article{CTT100634563,
  author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito},
  title = {Synchrotron Radiation-Assisted Silicon Film Growth by lrradiation Parallel to the Substrate},
  journal = {Japanese Journal of Applied Physics},
  year = 1992,
}

@article{CTT100634560,
  author = {Yasuo Nara and Yoshihiro Sugita and Noriaki Nakayama and Takashi Ito},
  title = {Etching of Si02 Film by Synchrotron Radiation in Hydrogen and its Application to Low Temperature Surface Cleaning},
  journal = {Journal of Vaccum Science and Technology},
  year = 1992,
}

@article{CTT100634553,
  author = {Yasuo Nara and Yoshihiro Sugita and Noriaki Nakayama and Takashi Ito},
  title = {Synchrotron Radiation Assisted Removal of Oxygen and Carbon Contaminants from a Silicon Surface},
  journal = {Japanese Journal of Applied Physics},
  year = 1991,
}

@article{CTT100634541,
  author = {Satoru Watanabe and Rinshi Sugino and Tatsuya Yamazaki and Yasuo Nara and Takashi Ito},
  title = {Wafer Cleaning with Photoexcited Chlorine and Thermal Treatment for High-Quality Silicon Epitaxy},
  journal = {Japanese Journal of Applied Physics},
  year = 1989,
}

@article{CTT100634539,
  author = {Takeo Hattori and Kazuhiro Takase and Hiroaki Yamagishi and Rinshi Sugino and Yasuo Nara and Takashi Ito},
  title = {Chemical Structures of Native Oxides Formed during Wet Chemical Treatment},
  journal = {Japanese journal of applied physics},
  year = 1989,
}

@article{CTT100634534,
  author = {杉野林志 and 奈良安雄 and 渡辺悟 and 伊藤隆司},
  title = {光励起塩素ラジカルを用いたシリコンのエッチングとクリーニング},
  journal = {電気化学および工業物理化学},
  year = 1988,
}

@inproceedings{CTT100634668,
  author = {Takashi Ito and Tatsuya Yamazaki and Satoru Watanabe and Yasuo Nara and Hajime Ishikawa},
  title = {Photoenhancement in Low-Temperature Silicon Epitaxy},
  booktitle = {Proc. Int. Symp. on Advanced Materials for ULSI, 1988 ECS Spring Meeting},
  year = 1998,
}

@inproceedings{CTT100634725,
  author = {Tatsuya Yamazaki and Kenichi Goto and Tetsu Fukano and Yasuo Nara and Toshihiro Sugii and Takashi Ito},
  title = {2l psec Switching 0.13μm-CMOS at Room Temperature Using High Performance Co Salicide Process},
  booktitle = {IEDM Dig. of Tech.},
  year = 1993,
}

@inproceedings{CTT100634713,
  author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito},
  title = {SR-Assisted Epitaxy and Surface Cleaning of Silicon},
  booktitle = {Proc. of A Workshop on Two-dimensional Semiconductor Research using Synchrotron Radiation},
  year = 1993,
}

@inproceedings{CTT100634722,
  author = {Akira Sato and Youichi Momiyama and Yasuo Nara and Toshihiro Sugii and Yoshihiro Arimoto and Takashi Ito},
  title = {A 0.5μm EEPROM Cell Using Poly-Si TFT Technology},
  booktitle = {Proc. 5lth Annual Device Research Conference},
  year = 1993,
}

@inproceedings{CTT100634711,
  author = {Yasuo Nara and Yoshio Sugita and Kei Horiuchi and Takashi Ito},
  title = {Evaluation of  Photoemitted Current from SiO2 Film on Silicon during Synchrotron Radiation  lrradiation},
  booktitle = {Proc. of Microprocess Conference},
  year = 1992,
}

@inproceedings{CTT100634685,
  author = {Takashi Ito and Rinshi Sugino and Satoru Watanabe and Yasuo Nara and Yasuhisa Sato},
  title = {UV-Enhanced Dry Cleaning of Silicon Wafers},
  booktitle = {Proc. Int. Symp. on Cleaning Technology in Semicon. Device},
  year = 1990,
}

@inproceedings{CTT100634669,
  author = {Satoru Watanabe and Rinshi Sugino and Tatsuya Yamazaki and Yasuo Nara and Takashi Ito},
  title = {Wafer-Cleaning with Photo-Excited Chlorine and Thermal Treatment for High-Quality Silicon Epitaxy},
  booktitle = {Dig. of 2nd MicroProcess Conf.},
  year = 1989,
}

@inproceedings{CTT100634678,
  author = {Kazuo Takase and Toshio Igarashi and Norio Miyata and Koji Moriki and Rinshi Sugino and Yasuo  Nara and Takashi Ito and Minoru Fujisawa and Takeo Hattori},
  title = {Native Oxide Formed  During Wet Chemical Treatments},
  booktitle = {Ext. Abs. of 2lst Conf. on SSDM},
  year = 1989,
}

@inproceedings{CTT100634681,
  author = {Takeo Hattori and Kazuki Takase and Hiroshi Yamagishi and Rinshi Sugino and Yasuo Nara and Takashi Ito},
  title = {Chemical Structures of Native Oxides Formed During Wet Chemical    Treatments},
  booktitle = {Abstract of Electronic Mat. Conf.},
  year = 1989,
}

@inproceedings{CTT100634667,
  author = {Satoru Watanabe and Tatsuya Yamazaki and Yasuo Nara and Takashi Ito},
  title = {Photo- Enhanced Boron Doping in Low-Temperature Silicon Epitaxy and its FTIR Study},
  booktitle = {Ext. Abs. of 20th Conf. on SSDM},
  year = 1988,
}

@inproceedings{CTT100634656,
  author = {Takashi Ito and Rinshi Sugino and Tatsuya Yamazaki and Satoru Watanabe and Yasuo Nara},
  title = {Photochemical Cleaning of Silicon Wafers with Halogen Radicals},
  booktitle = {1987 ECS Fall Meeting},
  year = 1987,
}

@inproceedings{CTT100634635,
  author = {Rinshi Sugino and Yasuo Nara and Tatsuya Yamazaki and Satoru Watanabe and Takashi Ito},
  title = {Through-Oxide Cleaning of Silicon Surface by Photo-Excited Radicals},
  booktitle = {Ext. Abs. of 19th Conf. on SSDM},
  year = 1987,
}