@article{CTT100634572,
  author = {Satoru Watanabe and Kei Horiuchi and Takashi Ito},
  title = {Atomic Step Structure on Vicinal H/Si (111) Surface Formed by Hot Water Immersion},
  journal = {Japanese Journal of Applied Physics},
  year = 1993,
}

@article{CTT100634554,
  author = {Satoru Watanabe and Mayumi Shigeno and Noriaki Nakayama and Takashi Ito},
  title = {Silicon Monohydride Termination of Silicon (111) Surface Formed by Boiling Water},
  journal = {Japanese Journal of Applied Physics},
  year = 1991,
}

@article{CTT100634550,
  author = {Satoru Watanabe and Noriaki Nakayama and Takashi Ito},
  title = {Homogeneous Hydrogen-Terminated Si(111) Surface Formed Using Aqueous HF Solution and Water},
  journal = {Applied Phisics Letters},
  year = 1991,
}

@article{CTT100634555,
  author = {渡辺悟 and 滋野真弓 and 伊藤隆司},
  title = {プロセスを高性能化する水素ターミネートSi表面},
  journal = {ウルトラクリーンテクノロジー},
  year = 1991,
}

@article{CTT100634544,
  author = {Tatsuya Yamazaki and Satoru Watanabe and Takashi Ito},
  title = {Heavy Boron Doping in Low Temperature Si Photoepitaxy},
  journal = {Journal of The Electrochemical Society},
  year = 1990,
}

@article{CTT100634541,
  author = {Satoru Watanabe and Rinshi Sugino and Tatsuya Yamazaki and Yasuo Nara and Takashi Ito},
  title = {Wafer Cleaning with Photoexcited Chlorine and Thermal Treatment for High-Quality Silicon Epitaxy},
  journal = {Japanese Journal of Applied Physics},
  year = 1989,
}

@article{CTT100634534,
  author = {杉野林志 and 奈良安雄 and 渡辺悟 and 伊藤隆司},
  title = {光励起塩素ラジカルを用いたシリコンのエッチングとクリーニング},
  journal = {電気化学および工業物理化学},
  year = 1988,
}

@inproceedings{CTT100634668,
  author = {Takashi Ito and Tatsuya Yamazaki and Satoru Watanabe and Yasuo Nara and Hajime Ishikawa},
  title = {Photoenhancement in Low-Temperature Silicon Epitaxy},
  booktitle = {Proc. Int. Symp. on Advanced Materials for ULSI, 1988 ECS Spring Meeting},
  year = 1998,
}

@inproceedings{CTT100634733,
  author = {Yoshihiro Sugita and Naoki Awaji and Satoshi Ohkubo and Satoru Watanabe and Satoshi Komiya and Takashi Ito},
  title = {X Ray Refractometry and Infrared Analysis of Native Oxides on Si(100) Formed in Chemical Treatment},
  booktitle = {Ext. Abst. of 1995 Int. Conf. on SSDM},
  year = 1995,
}

@inproceedings{CTT100634723,
  author = {Satoru Watanabe and Kei Horiuchi and Takashi Ito},
  title = {Stable Hydride Structure on Si(lll) Surface in Pure Water},
  booktitle = {Proc. MRS Symp.},
  year = 1993,
}

@inproceedings{CTT100634702,
  author = {Satoru Watanabe and Noriaki Nakayama and Takashi Ito},
  title = {Infrared Observation of Hydrogen-Terminated Silicon Surface with VUV Irradiation},
  booktitle = {Proceeding of New Aspects of Photon Induced Processes on Surfaces, First International Forum of Optoelectronics Industry},
  year = 1991,
}

@inproceedings{CTT100634691,
  author = {Satoru Watanabe and Mayumi Shigeno and Noriaki Nakayama and Takashi Ito},
  title = {Silicon Monohydride Termination of Silicon (111) Surface Formed by Boiling Water},
  booktitle = {Ext. Abst. of 1991 Int. Conf. on SSDM},
  year = 1991,
}

@inproceedings{CTT100634685,
  author = {Takashi Ito and Rinshi Sugino and Satoru Watanabe and Yasuo Nara and Yasuhisa Sato},
  title = {UV-Enhanced Dry Cleaning of Silicon Wafers},
  booktitle = {Proc. Int. Symp. on Cleaning Technology in Semicon. Device},
  year = 1990,
}

@inproceedings{CTT100634688,
  author = {Satoru Watanabe and Takashi Ito},
  title = {Diborane Addition Effect on Second Order Reactions of Si Photo-CVD under Vacuum Ultraviolet lrradiation},
  booktitle = {Ext. Abst. of Int. Conf. on SSDM},
  year = 1990,
}

@inproceedings{CTT100634669,
  author = {Satoru Watanabe and Rinshi Sugino and Tatsuya Yamazaki and Yasuo Nara and Takashi Ito},
  title = {Wafer-Cleaning with Photo-Excited Chlorine and Thermal Treatment for High-Quality Silicon Epitaxy},
  booktitle = {Dig. of 2nd MicroProcess Conf.},
  year = 1989,
}

@inproceedings{CTT100634671,
  author = {Satoru Watanabe and Tatsuya Yamazaki and Takashi Ito},
  title = {Wavelength Dependence Boron Doping in Silicon Photochemical Vapor Deposition},
  booktitle = {Proc. of SPIE},
  year = 1989,
}

@inproceedings{CTT100634667,
  author = {Satoru Watanabe and Tatsuya Yamazaki and Yasuo Nara and Takashi Ito},
  title = {Photo- Enhanced Boron Doping in Low-Temperature Silicon Epitaxy and its FTIR Study},
  booktitle = {Ext. Abs. of 20th Conf. on SSDM},
  year = 1988,
}

@inproceedings{CTT100634656,
  author = {Takashi Ito and Rinshi Sugino and Tatsuya Yamazaki and Satoru Watanabe and Yasuo Nara},
  title = {Photochemical Cleaning of Silicon Wafers with Halogen Radicals},
  booktitle = {1987 ECS Fall Meeting},
  year = 1987,
}

@inproceedings{CTT100634635,
  author = {Rinshi Sugino and Yasuo Nara and Tatsuya Yamazaki and Satoru Watanabe and Takashi Ito},
  title = {Through-Oxide Cleaning of Silicon Surface by Photo-Excited Radicals},
  booktitle = {Ext. Abs. of 19th Conf. on SSDM},
  year = 1987,
}

@inproceedings{CTT100634634,
  author = {Tatsuya Yamazaki and Satoru Watanabe and Toshihiro Sugii and Takashi Ito},
  title = {Ultra Shallow p+ /n Junction Formed by Photo-Enhanced Low-Temperature Epitaxy},
  booktitle = {Tech. Dig. of IEDM},
  year = 1987,
}