@article{CTT100634545, author = {Tatsuya Yamazaki and Hiroshi Minakata and Takashi Ito}, title = {Continuous Growth of Low-Temperature Si Epitaxial Layer with Heavily Phosphorous and Boron Doping Using Photoepitaxy}, journal = {Journal of The Electrochemical Society}, year = 1990, } @article{CTT100634538, author = {Tatsuya Yamazaki and Hiroshi Minakata and Takashi Ito}, title = {Continuous Growth of Heavily Doped p+-n+ Si Epitaxial Layer Using Low-Temperature Photoepitaxy}, journal = {Applied Physics Letters}, year = 1989, } @inproceedings{CTT100634680, author = {Tatsuya Yamazaki and Hiroshi Minakata and Takashi Ito}, title = {Abrupt and Defect-free p+-n+ Junction Formed by Low-Temperature Photo-Epitaxy with Continuous Boron and Phosphorous Doping}, booktitle = {Ext. Abs. of 2lst Conf. on SSDM}, year = 1989, }