@article{CTT100634581,
  author = {Yoji Saito and Hideo Imai and Yoshihiro Sugita and Takashi Ito},
  title = {Effects of Vacuum-Ultraviolet-Light-Induced Surface Reaction on Selective and Anisotropic Etching of Silicon Dioxide Using Anhydrous Hydrogen Fluoride Gas},
  journal = {Japanese Journal of Applied Physics},
  year = 1995,
}

@article{CTT100634575,
  author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito},
  title = {Fine Pattern Etching of Silicon Using SR-Assisted lonization of CP4 Gas},
  journal = {Journal of Photopolymer Science and Technology},
  year = 1993,
}

@article{CTT100634559,
  author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito},
  title = {Synchrotron Radiation-Assisted Silicon Homoepitaxy at 100 ℃ Using Si2H6/H2 Mixture},
  journal = {Applied Phisics Letters},
  year = 1992,
}

@article{CTT100634563,
  author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito},
  title = {Synchrotron Radiation-Assisted Silicon Film Growth by lrradiation Parallel to the Substrate},
  journal = {Japanese Journal of Applied Physics},
  year = 1992,
}

@article{CTT100634560,
  author = {Yasuo Nara and Yoshihiro Sugita and Noriaki Nakayama and Takashi Ito},
  title = {Etching of Si02 Film by Synchrotron Radiation in Hydrogen and its Application to Low Temperature Surface Cleaning},
  journal = {Journal of Vaccum Science and Technology},
  year = 1992,
}

@article{CTT100634553,
  author = {Yasuo Nara and Yoshihiro Sugita and Noriaki Nakayama and Takashi Ito},
  title = {Synchrotron Radiation Assisted Removal of Oxygen and Carbon Contaminants from a Silicon Surface},
  journal = {Japanese Journal of Applied Physics},
  year = 1991,
}

@inproceedings{CTT100634733,
  author = {Yoshihiro Sugita and Naoki Awaji and Satoshi Ohkubo and Satoru Watanabe and Satoshi Komiya and Takashi Ito},
  title = {X Ray Refractometry and Infrared Analysis of Native Oxides on Si(100) Formed in Chemical Treatment},
  booktitle = {Ext. Abst. of 1995 Int. Conf. on SSDM},
  year = 1995,
}

@inproceedings{CTT100634713,
  author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito},
  title = {SR-Assisted Epitaxy and Surface Cleaning of Silicon},
  booktitle = {Proc. of A Workshop on Two-dimensional Semiconductor Research using Synchrotron Radiation},
  year = 1993,
}