論文

• Yasuhiro Sato, Rinshi Sugino, Takashi Ito. Photoexcited Processes for Semiconductor Dry Cleaning and Dry Etching, FUJITSU SCIENTIFIC & TECHNICAL JOURNAL, Fijitsu, Vol. 27, No. 4, pp. 317-325, Dec. 1991.

国際会議発表 (査読有り)

• Takashi Ito, Rinshi Sugino, Yasuhiro Sato, Masaki Okuno, Akira Osawa, Takayuki Aoyama, Tatsuya Yamazaki, Yoshihiro Arimoto. Photo-Excited Cleaning of Silicon with Chlorine and Fluorine, MRS Symp. Proceeding, MRS Symp. Proceeding, 1992.

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