@article{CTT100634572, author = {Satoru Watanabe and Kei Horiuchi and Takashi Ito}, title = {Atomic Step Structure on Vicinal H/Si (111) Surface Formed by Hot Water Immersion}, journal = {Japanese Journal of Applied Physics}, year = 1993, } @article{CTT100634575, author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito}, title = {Fine Pattern Etching of Silicon Using SR-Assisted lonization of CP4 Gas}, journal = {Journal of Photopolymer Science and Technology}, year = 1993, } @article{CTT100634565, author = {Yasuo Nara and Fabrice Moscheni and Yoshio Sugita and Kei Horiuchi and Takashi Ito}, title = {Evaluation of Photoemitted Current from SiO2 Film on Silicon During Synchrotron Radiation lrradiation}, journal = {Japanese Journal of Applied Physics}, year = 1992, } @article{CTT100634559, author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito}, title = {Synchrotron Radiation-Assisted Silicon Homoepitaxy at 100 ℃ Using Si2H6/H2 Mixture}, journal = {Applied Phisics Letters}, year = 1992, } @article{CTT100634563, author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito}, title = {Synchrotron Radiation-Assisted Silicon Film Growth by lrradiation Parallel to the Substrate}, journal = {Japanese Journal of Applied Physics}, year = 1992, } @inproceedings{CTT100634723, author = {Satoru Watanabe and Kei Horiuchi and Takashi Ito}, title = {Stable Hydride Structure on Si(lll) Surface in Pure Water}, booktitle = {Proc. MRS Symp.}, year = 1993, } @inproceedings{CTT100634713, author = {Yasuo Nara and Yoshihiro Sugita and Kei Horiuchi and Takashi Ito}, title = {SR-Assisted Epitaxy and Surface Cleaning of Silicon}, booktitle = {Proc. of A Workshop on Two-dimensional Semiconductor Research using Synchrotron Radiation}, year = 1993, } @inproceedings{CTT100634711, author = {Yasuo Nara and Yoshio Sugita and Kei Horiuchi and Takashi Ito}, title = {Evaluation of Photoemitted Current from SiO2 Film on Silicon during Synchrotron Radiation lrradiation}, booktitle = {Proc. of Microprocess Conference}, year = 1992, }