論文

• Satoru Watanabe, Kei Horiuchi, Takashi Ito. Atomic Step Structure on Vicinal H/Si (111) Surface Formed by Hot Water Immersion, Japanese Journal of Applied Physics, The Japan Society of Applied Phisics, Vol. 32, No. 8, pp. 3420-3425, Aug. 1993.
• Yasuo Nara, Yoshihiro Sugita, Kei Horiuchi, Takashi Ito. Fine Pattern Etching of Silicon Using SR-Assisted lonization of CP4 Gas, Journal of Photopolymer Science and Technology, The Conference of Photopolymer Science and Technology, Vol. 6, No. 4, pp. 617-24, 1993.
• Yasuo Nara, Fabrice Moscheni, Yoshio Sugita, Kei Horiuchi, Takashi Ito. Evaluation of Photoemitted Current from SiO2 Film on Silicon During Synchrotron Radiation lrradiation, Japanese Journal of Applied Physics, The Japan Society of Applied Phisics, Vol. 31, No. 12B, pp. 4454-4458, Dec. 1992.
• Yasuo Nara, Yoshihiro Sugita, Kei Horiuchi, Takashi Ito. Synchrotron Radiation-Assisted Silicon Homoepitaxy at 100 ℃ Using Si2H6/H2 Mixture, Applied Phisics Letters, American Institute of Physics, Vol. 61, No. 1, pp. 93-95, July 1992.
• Yasuo Nara, Yoshihiro Sugita, Kei Horiuchi, Takashi Ito. Synchrotron Radiation-Assisted Silicon Film Growth by lrradiation Parallel to the Substrate, Japanese Journal of Applied Physics, The Japan Society of Applied Phisics, Vol. 31, No. 8, pp. 2333-2337, June 1992.

国際会議発表 (査読有り)

• Satoru Watanabe, Kei Horiuchi, Takashi Ito. Stable Hydride Structure on Si(lll) Surface in Pure Water, Proc. MRS Symp., Proc. MRS Symp., Vol. 315, p. 458, 1993.
• Yasuo Nara, Yoshihiro Sugita, Kei Horiuchi, Takashi Ito. SR-Assisted Epitaxy and Surface Cleaning of Silicon, Proc. of A Workshop on Two-dimensional Semiconductor Research using Synchrotron Radiation, Proc. of A Workshop on Two-dimensional Semiconductor Research using Synchrotron Radiation, p. 15, 1993.
• Yasuo Nara, Yoshio Sugita, Kei Horiuchi, Takashi Ito. Evaluation of Photoemitted Current from SiO2 Film on Silicon during Synchrotron Radiation lrradiation, Proc. of Microprocess Conference, Proc. of Microprocess Conference, pp. 184-185, 1992.

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