@article{CTT100634566, author = {Toshihiro Sugii and Tatsuya Yamazaki and Yoshihiro Arimoto and Takashi Ito and Yuji Furumura and Ikuo.Namura and Hiroshi Goto and Toshiya Tahara}, title = {SiC Growth and its Application to High Speed Si-HBTs}, journal = {Microelectronic Engineering}, year = 1992, }