@article{CTT100634582,
  author = {Fumitoshi Sugimoto and Yoshihiro Arimoto and Takashi Ito},
  title = {Simultaneous Temperature Measurement of Wafers in Chemical Mechanical Polishing of Silicon Dioxide Layer},
  journal = {Japanese Journal of Applied Physics},
  year = 1995,
}

@article{CTT100634580,
  author = {Fumitoshi Sugimoto and Hiroshi Horie and Yoshihiro Arimoto and Takashi Ito},
  title = {A pH-Controlled Chemical Mechanical Polishing Method for Thin Bonded Silicon-on-Insulator Wafers},
  journal = {Japanese Journal of Applied Physics},
  year = 1995,
}

@article{CTT100634570,
  author = {Yoshihiro Arimoto and Hiroshi Horie and Naoshi Higaki and Manabu Kojima and Fumitoshi Sugimoto and Takashi Ito},
  title = {Advanced Metal Oxide Semiconductor and Bipolar Devices on Bonded Silicon-on-Insulators},
  journal = {Journal of The Electrochemical Society},
  year = 1993,
}