論文

• Fumitoshi Sugimoto, Yoshihiro Arimoto, Takashi Ito. Simultaneous Temperature Measurement of Wafers in Chemical Mechanical Polishing of Silicon Dioxide Layer, Japanese Journal of Applied Physics, The Japan Society of Applied Phisics, Vol. 34, No. 12A, pp. 6314-6320, Dec. 1995.
• Fumitoshi Sugimoto, Hiroshi Horie, Yoshihiro Arimoto, Takashi Ito. A pH-Controlled Chemical Mechanical Polishing Method for Thin Bonded Silicon-on-Insulator Wafers, Japanese Journal of Applied Physics, The Japan Society of Applied Phisics, Vol. 34, No. 1, pp. 30-35, Jan. 1995.
• Yoshihiro Arimoto, Hiroshi Horie, Naoshi Higaki, Manabu Kojima, Fumitoshi Sugimoto, Takashi Ito. Advanced Metal Oxide Semiconductor and Bipolar Devices on Bonded Silicon-on-Insulators, Journal of The Electrochemical Society, The Electrochemical Society, Vol. 140, No. 4, pp. 1138-1143, Apr. 1993.

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