@article{CTT100634579,
  author = {Takayuki Aoyama and Kunihiro Suzuki and Hiroko Tashiro and Yoko Toda and Tatsuya Yamazaki and Kanetake Takasaki and Takashi Ito},
  title = {Effect of Fluorine on Boron Diffusion in Thin Silicon Dioxides and Oxynitride},
  journal = {Journal of Applied Physics},
  year = 1994,
}