@inproceedings{CTT100634731,
  author = {Rinshi Sugino and Yoshiko Okui and Mayumi Shigeno and Satoshi  Ohkubo and Kanetake Takasaki and Takashi Ito},
  title = {Dry Cleaning of Si and SiO2 Surfaces Using SiC14 System},
  booktitle = {Proc. Int. Symp. on Semicon. Manufacturing},
  year = 1995,
}

@inproceedings{CTT100634733,
  author = {Yoshihiro Sugita and Naoki Awaji and Satoshi Ohkubo and Satoru Watanabe and Satoshi Komiya and Takashi Ito},
  title = {X Ray Refractometry and Infrared Analysis of Native Oxides on Si(100) Formed in Chemical Treatment},
  booktitle = {Ext. Abst. of 1995 Int. Conf. on SSDM},
  year = 1995,
}