@inproceedings{CTT100634614,
  author = {Masaru Muto and Takashi Kato and Takashi Ito and Hajime Ishikawa},
  title = {ZrSi2 for LSI Contat System},
  booktitle = {Proc. of Tech. papers on Int. Symp. on VLSI Tech. Sys. and Appli.},
  year = 1985,
}

@inproceedings{CTT100634615,
  author = {Masaru Muto and Takashi Kato and Takashi Ito and Hajime Ishikawa},
  title = {Self-aligned  Silicidation of Zr and Its Comparison with Ti},
  booktitle = {Ext. Abst. of 17th Conf. on SSDM},
  year = 1985,
}