@article{CTT100634568,
  author = {Yasuhisa Sato and Rinshi Sugino and Masaki Okuno and Toshiro Nakanishi and Takashi Ito},
  title = {Electrical Characteristics of Silicon Devices after UV-Excited Cleaning},
  journal = {IEICE Transaction on Electronics},
  year = 1993,
}

@article{CTT100634564,
  author = {Rinshi Sugino and Yoshiko Okui and Masaki Okuno and Mayumi Shigeno and Yasuhisa Sato and Akira Osawa and Takashi Ito},
  title = {Removal of Fe and Al on a Silicon Surface Using UV-Excited Dry Cleaning},
  journal = {IEICE TRANSACTIONS on Electronics},
  year = 1992,
}

@inproceedings{CTT100634718,
  author = {Takashi Ito and Rinshi Sugino and Yasuhisa Sato},
  title = {Reliable Thin Gate Oxide Film Formed After UV Cleaning},
  booktitle = {Proc. 4th Int. Symp. on ULSI Sci. and Tech.},
  year = 1993,
}

@inproceedings{CTT100634689,
  author = {Yasuhisa Sato and Rinshi Sugino and Masaki Okuno and Nobuo Kikuchi and Junichi Teramae and Akinao Ogawa and Shinpei Hijiya and Takashi Ito},
  title = {Photo-Excited Dry Cleaning for ULSI},
  booktitle = {Proc. of VLSI Symp. on Tech. System and Application},
  year = 1991,
}

@inproceedings{CTT100634704,
  author = {Rinshi Sugino and Masaki Okuno and Yoshiko Okui and Mayumi Shigeno and Yasuhisa Sato and Akira Osawa and Takashi Ito},
  title = {UV Excited Dry Cleaning of Silicon Surfaces Contaminated with lron and Aluminum},
  booktitle = {Proc. of 2nd Int. Symp. on Cleaning Technology in Semicon. Device Manufacturing, ECS Fall Meeting},
  year = 1991,
}

@inproceedings{CTT100634684,
  author = {Yasuhisa Sato and Rinshi Sugino and Masaki Okuno and Takashi Ito},
  title = {Reliability Improvement of the MOS Structures Using Photo-Excited Dry Cleaning Before Oxidation},
  booktitle = {Ext. Abst. of Int. Conf. on SSDM},
  year = 1990,
}

@inproceedings{CTT100634685,
  author = {Takashi Ito and Rinshi Sugino and Satoru Watanabe and Yasuo Nara and Yasuhisa Sato},
  title = {UV-Enhanced Dry Cleaning of Silicon Wafers},
  booktitle = {Proc. Int. Symp. on Cleaning Technology in Semicon. Device},
  year = 1990,
}

@inproceedings{CTT100634676,
  author = {Rinshi Sugino and Ryuji Takizawa and Yasuhisa Sato and Takashi Ito},
  title = {Characterization  of Si-SiO2 Interfaces Formed After Photo-Excited Cleaning},
  booktitle = {Ext. Abs. of 2lst Conf. on SSDM},
  year = 1989,
}