@article{CTT100634580, author = {Fumitoshi Sugimoto and Hiroshi Horie and Yoshihiro Arimoto and Takashi Ito}, title = {A pH-Controlled Chemical Mechanical Polishing Method for Thin Bonded Silicon-on-Insulator Wafers}, journal = {Japanese Journal of Applied Physics}, year = 1995, } @article{CTT100634576, author = {Kunihiro Suzuki and Tetsu Tanaka and Yoshiharu Tosaka and Hiroshi Horie and Yoshihiro Arimoto and Takashi Ito}, title = {Analytical Surface Potential Expression for Thin Film Double-Gate SOI MOSFETs}, journal = {Solid-State Electron}, year = 1994, } @article{CTT100634577, author = {Rinshi Sugino and Yasuo Nara and Hiroshi Horie and Takashi Ito}, title = {Ultraviolet Excited Cl-Radical Etching of Si Through Native Oxides}, journal = {Journal of Applied Physics}, year = 1994, } @article{CTT100634570, author = {Yoshihiro Arimoto and Hiroshi Horie and Naoshi Higaki and Manabu Kojima and Fumitoshi Sugimoto and Takashi Ito}, title = {Advanced Metal Oxide Semiconductor and Bipolar Devices on Bonded Silicon-on-Insulators}, journal = {Journal of The Electrochemical Society}, year = 1993, } @article{CTT100634528, author = {Takashi Ito and Hiroshi Horie and Tetsu Fukano and Hajime Ishikawa}, title = {A Nitride-Isolated Molybdenum-Polysilicon Gate Electrode for MOS VLSI Circuits}, journal = {IEE Trans Electron Devices}, year = 1986, } @inproceedings{CTT100634715, author = {Kunihiro Suzuki and Tetsu Tanaka and Hiroshi Horie and Yoshihiro Arimoto and Takashi Ito}, title = {Analytical Surface Potential Expression for Double-Gate SOI MOS FETS}, booktitle = {Proc. Int. Workshop on VLSI Process and Device Modeling}, year = 1993, } @inproceedings{CTT100634712, author = {Fumio Sugimoto and Hiroshi Horie and Yoshihiro Arimoto and Takashi Ito}, title = {A pH- Controlled Chemical Mechanical Polishing Method for Ultra-Thin Bonded SOI Wafer}, booktitle = {Dig. of Tech. Papers, Symp. on VLSI Tech.}, year = 1993, } @inproceedings{CTT100634617, author = {Takashi Ito and Hiroshi Horie and Tetsu Fukano and Hajime Ishikawa}, title = {A Nitride Isolated Molybdenum-Polysilicon Gate Electrode}, booktitle = {Dig. of Tech. Papers on 1985 Symp. on VLSI Tech.}, year = 1985, } @inproceedings{CTT100634610, author = {Hiroshi Horie and Tetsu Fukano and Takashi Ito and Hajime Ishikawa}, title = {Multiple Self-Alignment MOS Technology (MUSA/MOS)}, booktitle = {Tech. Dig. of IEDM}, year = 1984, }